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Способ создания конусообразных Si частиц на поверхности кремния без использования процессов травления
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Laboratory of functional diagnostics of low-dimensional structures for nanoelectronics
Analytical and Technological Research Center "High Technologies & Nanostructured Materials"
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НОУ-ХАУ № 51
1.19 MB
, PDF document
Dmitry Utkin
(Author)
Александр Андреевич Шкляев
(Author)
Original language
Russian
Patent number
51
Priority date
08.12.2021
Publication status
Published -
9 Dec 2021
State classification of scientific and technological information
29.19.31 Semiconductors
29.19.22 Physics of nanostructures. Diskeraser-wide structure. Mesoscopic structures
29.31.27 Interaction of optical radiation with matter
ID: 34914098
