DOI

  • И.Н. ЛЯПУСТИН
  • В.Г. МАНСУРОВ
  • Т.В. МАЛИН
  • А.М. ГИЛИНСКИЙ
  • Я.Е. МАЙДЭБУРА
  • В.И. ВДОВИН
  • Ю.А. ЖИВОДКОВ
  • Д.С. МИЛАХИН
Translated title of the contributionAUTOMATION OF GROWTH RATE MEASUREMENTS FOR ALN/GAN HETEROEPITAXIAL STRUCTURES WITH A TWO-DIMENSIONAL ELECTRON GAS, GROWN USING AMMONIA MOLECULAR BEAM EPITAXY
Original languageRussian
Pages (from-to)122-133
Number of pages12
JournalАвтометрия
Volume4
Issue number4
DOIs
Publication statusPublished - 2025

    Research areas

  • III-NITRIDES, AMMONIA MBE, ALGAN/ALN/GAN HETEROSTRUCTURES, GROWTH RATE, FFT FILTERING

    OECD FOS+WOS

  • 1.02 COMPUTER AND INFORMATION SCIENCES

ID: 71989672