Research output: Contribution to journal › Article › peer-review
| Translated title of the contribution | SYNTHESIS OF TITANIFEROUS FILMS BY THE METHOD OF MAGNETRON SPUTTERING IN A DISCHARGE WITH A SMALL ANODE WHILE ANNEALING IN NITROGEN AND AIR |
|---|---|
| Original language | Russian |
| Pages (from-to) | 755-761 |
| Journal | Теплофизика и аэромеханика |
| Volume | 32 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - 2025 |
ID: 74249270