Research output: Contribution to journal › Article › peer-review
| Translated title of the contribution | INFLUENCE OF SMALL ANODE DISCHARGE ON THE PROPERTIES OF THIN TITANIUM-CONTAINING FILMS OBTAINED BY MAGNETRON SPUTTERING WITH SUBSEQUENT ANNEALING |
|---|---|
| Original language | Russian |
| Pages (from-to) | 916-930 |
| Journal | Журнал Сибирского федерального университета. Серия: техника и технологии |
| Volume | 18 |
| Issue number | 7 |
| Publication status | Published - 2025 |
ID: 74614360