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Способ создания антиотражающих покрытий из частиц германия в виде упорядоченных субмикронных дисков на поверхности КНИ подложек
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Analytical and Technological Research Center "High Technologies & Nanostructured Materials"
Laboratory of functional diagnostics of low-dimensional structures for nanoelectronics
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Дмитрий Евгеньевич Уткин
(Author)
Александр Андреевич Шкляев
(Author)
Original language
Russian
Patent number
79
Priority date
22.12.2022
Publication status
Published -
22 Dec 2022
State classification of scientific and technological information
29.19.31 Semiconductors
29.19.22 Physics of nanostructures. Diskeraser-wide structure. Mesoscopic structures
29.31.27 Interaction of optical radiation with matter
ID: 42221970
