Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review
Original language | Russian |
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Title of host publication | Материалы XXI научно-технической конференции «Вакуумная наука и техника» |
Editors | Д. В. Быков |
Place of Publication | Москва |
Publisher | МИЭМ НИУ ВШЭ |
Pages | 76-82 |
Number of pages | 7 |
Publication status | Published - Sept 2014 |
ID: 27273869