• Евгений Николаевич Галашов (Author)
Original languageRussian
Patent number2787495
IPCD01D 5/088
Priority date02.08.2022
Publication statusPublished - 9 Jan 2023

    State classification of scientific and technological information

  • 29.19.16 Physics of thin films. Surface and interface
  • 29.19.13 Mechanical properties of solids
  • 29.19.09 Thermal properties of solids

ID: 36710787