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Поляризационный фильтр для эллипсометра миллиметрового диапазона спектра
Research output
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Patent
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Patent for invention
Laboratory of functional diagnostics of low-dimensional structures for nanoelectronics
Overview
Cite this
Links
https://new.fips.ru/registers-doc-view/fips_servlet?DB=RUPAT&DocNumber=2838341&TypeFile=html
Сергей Александрович Кузнецов
(Author)
Виктор Николаевич Федоринин
(Author)
Александр Витальевич Гельфанд
(Author)
Original language
Russian
Patent number
2838341
Priority date
31.10.2024
Filing date
31.10.2024
Publication status
Published -
14 Apr 2025
State classification of scientific and technological information
29.35.19 The Propagation of electromagnetic waves
29.35.33 Millimeter and submillimeter waves
ID: 60761833
