Increasing the spatial resolution of direct laser writing of diffractive structures on thin films of titanium group metals

Korolkov, V. P., Sedukhin, A. G., Belousov, D. A., Shimansky, R. V., Khomutov, V. N., Mikerin, S. L., Spesivtsev, E. V. & Kutz, R. I., 1 Jan 2019, Holography: Advances and Modern Trends VI. Fimia, A., Hrabovsky, M. & Sheridan, J. T. (eds.). SPIE, 110300A. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 11030).

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