Increasing the spatial resolution of direct laser writing of diffractive structures on thin films of titanium group metals › Research Explorer

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Increasing the spatial resolution of direct laser writing of diffractive structures on thin films of titanium group metals

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

Department of Physics

DOI

https://doi.org/10.1117/12.2520978
Final published version

Victor P. Korolkov
Andrey G. Sedukhin
Dmitry A. Belousov
Ruslan V. Shimansky
Vladimir N. Khomutov
Sergey L. Mikerin
Evgeny V. Spesivtsev
Roman I. Kutz

Original language	English
Title of host publication	Holography
Subtitle of host publication	Advances and Modern Trends VI
Editors	Antonio Fimia, Miroslav Hrabovsky, John T. Sheridan
Publisher	SPIE
ISBN (Electronic)	9781510627260
DOIs	https://doi.org/10.1117/12.2520978
Publication status	Published - 1 Jan 2019
Event	Holography: Advances and Modern Trends VI 2019 - Prague, Czech Republic Duration: 1 Apr 2019 → 4 Apr 2019

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	11030
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	Holography: Advances and Modern Trends VI 2019
Country/Territory	Czech Republic
City	Prague
Period	01.04.2019 → 04.04.2019

Research areas

direct laser writing, thin metal films, metal-oxide mask, spatial resolution, amplitude diffractive structures, thermochemical laser writing, through oxidation, titanium group metals, OPTICAL-CONSTANTS, OXIDATION, TI

ID: 22363038