Kinetic Study of Ge Nanocluster Formation in Composite GeOx[SiO2] Films

Kislukhin, N. A., Astankova, K. N. & Volodin, V. A., 8 Aug 2025, International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM. IEEE Computer Society, p. 120-124 5 p. (International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review