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Алена Леонидовна Богословцева
Bogoslovtseva, Alena Leonidovna
Associate researcher
Department of Physics
Laboratory of functional diagnostics of low-dimensional structures for nanoelectronics
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2018
Influence of Precursor Gas Flow Rate on Fluoropolymer Coating Growth Rate During Hot Wire Chemical Vapor Deposition
Сафонов, А. И.
,
Суляева, В.
,
Богословцева, А. Л.
&
Тимошенко, Н. И.
,
1 Sept 2018
,
In:
Journal of Applied Mechanics and Technical Physics.
59
,
5
,
p. 842-846
5 p.
, 10.
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ID: 3496846