Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
Transition from superhydrophilic to superhydrophobic of silicon wafer by a combination of laser treatment and fluoropolymer deposition. / Starinskiy, Sergey V.; Bulgakov, Alexander V.; Gatapova, Elizaveta Ya и др.
в: Journal Physics D: Applied Physics, Том 51, № 25, 255307, 27.06.2018.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
}
TY - JOUR
T1 - Transition from superhydrophilic to superhydrophobic of silicon wafer by a combination of laser treatment and fluoropolymer deposition
AU - Starinskiy, Sergey V.
AU - Bulgakov, Alexander V.
AU - Gatapova, Elizaveta Ya
AU - Shukhov, Yuri G.
AU - Sulyaeva, Veronica S.
AU - Timoshenko, Nikolay I.
AU - Safonov, Alexey I.
N1 - Publisher Copyright: © 2018 IOP Publishing Ltd.
PY - 2018/6/27
Y1 - 2018/6/27
N2 - We propose a novel approach for synthesizing silicon surfaces ensuring arbitrary apparent contact angle within the range from 0° to 170° for water. Superhydrophilicity of silicon substrates is achieved by nanosecond laser treatment and subsequent change in the contact angle is obtained by deposition of fluoropolymer films with different thicknesses by a hot wire chemical vapor deposition (HWCVD) method. The deposited film thickness needed to obtain superhydrophobicity was determined. The wettability properties of the produced fluoropolymer-silicon system are analyzed using the Wenzel and Cassie theories.
AB - We propose a novel approach for synthesizing silicon surfaces ensuring arbitrary apparent contact angle within the range from 0° to 170° for water. Superhydrophilicity of silicon substrates is achieved by nanosecond laser treatment and subsequent change in the contact angle is obtained by deposition of fluoropolymer films with different thicknesses by a hot wire chemical vapor deposition (HWCVD) method. The deposited film thickness needed to obtain superhydrophobicity was determined. The wettability properties of the produced fluoropolymer-silicon system are analyzed using the Wenzel and Cassie theories.
KW - fluoropolymer
KW - HWCVD
KW - laser treatment
KW - superhydrophilic
KW - superhydrophobic
KW - DESIGN
KW - WETTABILITY
KW - BEHAVIOR
KW - CONTACT ANGLES
KW - SUBSTRATE
KW - RESISTANCE
KW - COATINGS
KW - FABRICATION
KW - EQUATION
KW - SURFACES
UR - http://www.scopus.com/inward/record.url?scp=85048306364&partnerID=8YFLogxK
U2 - 10.1088/1361-6463/aac641
DO - 10.1088/1361-6463/aac641
M3 - Article
AN - SCOPUS:85048306364
VL - 51
JO - Journal Physics D: Applied Physics
JF - Journal Physics D: Applied Physics
SN - 0022-3727
IS - 25
M1 - 255307
ER -
ID: 13924047