Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
Thermodynamic Modeling of the Composition of Condensed Phases during the Decomposition of Iron(III) Acetylacetonate. / Rikhter, E. A.; Varvarinskaya, S. E.; Sysoev, S. V. и др.
в: Russian Journal of Physical Chemistry A, Том 99, № 5, 27.05.2025, стр. 1129-1134.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
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TY - JOUR
T1 - Thermodynamic Modeling of the Composition of Condensed Phases during the Decomposition of Iron(III) Acetylacetonate
AU - Rikhter, E. A.
AU - Varvarinskaya, S. E.
AU - Sysoev, S. V.
AU - Bespyatov, M. A.
AU - Vikulova, E. S.
AU - Gelfond, N. V.
N1 - Thermodynamic Modeling of the Composition of Condensed Phases during the Decomposition of Iron(III) Acetylacetonate / E. A. Rikhter, S. E. Varvarinskaya, S. V. Sysoev [et al.] // Russian Journal of Physical Chemistry A. – 2025. – Vol. 99, No. 5. – P. 1129-1134. – DOI 10.1134/S0036024425700177.
PY - 2025/5/27
Y1 - 2025/5/27
N2 - Abstract: Thermodynamic modeling of the composition of condensed phases formed during the decomposition of the volatile precursor Fe(acac)3, iron(III) acetylacetonate is performed as a function of the conditions (temperatures, total pressures, and amounts of added oxygen). The initial thermodynamic data for gaseous and crystalline Fe(acac)3 (the enthalpy and entropy of formation and the temperature dependences of heat capacity) and its sublimation are selected and processed. It is shown that introducing a set of consistent thermal data on the precursor does not affect the modeling results; i.e., the initial substance is thermodynamically unstable in equilibrium with possible components of the gas phase, complicating the model calculations. The obtained diagrams can be useful for optimizing processes of the chemical vapor-phase deposition of materials containing iron oxide or carbide phases.
AB - Abstract: Thermodynamic modeling of the composition of condensed phases formed during the decomposition of the volatile precursor Fe(acac)3, iron(III) acetylacetonate is performed as a function of the conditions (temperatures, total pressures, and amounts of added oxygen). The initial thermodynamic data for gaseous and crystalline Fe(acac)3 (the enthalpy and entropy of formation and the temperature dependences of heat capacity) and its sublimation are selected and processed. It is shown that introducing a set of consistent thermal data on the precursor does not affect the modeling results; i.e., the initial substance is thermodynamically unstable in equilibrium with possible components of the gas phase, complicating the model calculations. The obtained diagrams can be useful for optimizing processes of the chemical vapor-phase deposition of materials containing iron oxide or carbide phases.
KW - chemical vapor-phase deposition
KW - iron carbides
KW - iron oxides
KW - iron(III) acetylacetonate
KW - thermodynamic modeling
UR - https://www.mendeley.com/catalogue/243e6249-664d-3333-8343-8cb4a26b7991/
UR - https://www.scopus.com/record/display.uri?eid=2-s2.0-105006705729&origin=inward&txGid=1b216c7cc0dbb3818571f124b6c2989c
UR - https://www.elibrary.ru/item.asp?id=82357981
U2 - 10.1134/S0036024425700177
DO - 10.1134/S0036024425700177
M3 - Article
VL - 99
SP - 1129
EP - 1134
JO - Russian Journal of Physical Chemistry A
JF - Russian Journal of Physical Chemistry A
SN - 0036-0244
IS - 5
ER -
ID: 67457390