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The regularities of phase formation in Fe3Si(111)/Si(111) structure at vacuum annealing. / Volochaev, M. N.; Tarasov, I. A.; Loginov, Yu Yu и др.
в: Journal of Physics: Conference Series, Том 857, № 1, 012053, 01.06.2017.Результаты исследований: Научные публикации в периодических изданиях › статья по материалам конференции › Рецензирование
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TY - JOUR
T1 - The regularities of phase formation in Fe3Si(111)/Si(111) structure at vacuum annealing
AU - Volochaev, M. N.
AU - Tarasov, I. A.
AU - Loginov, Yu Yu
AU - Cherkov, A. G.
AU - Kovalev, I. V.
PY - 2017/6/1
Y1 - 2017/6/1
N2 - The regularities of phase formation and thermal stability in Fe3Si(111)/Si(111) structure at stepped vacuum annealing (350, 450 and 550 °C) were investigated. The layer of 32 nm Fe3Si was deposited onto Si(111) substrate by molecular beam epitaxy at 260 °C. Transmission electron microscopy (TEM) measurements demonstrated that the film thickness increases by ∼19 % at 350 °C annealing without changing the phase composition. The polycrystalline -FeSi sublayer was formed on the interface at 450 °C annealing. Further annealing at 550 °C led to the ∼ 80 nm polycrystalline film formation containing the crystallites of -FeSi, Fe5Si3, and β-FeSi2 phases.
AB - The regularities of phase formation and thermal stability in Fe3Si(111)/Si(111) structure at stepped vacuum annealing (350, 450 and 550 °C) were investigated. The layer of 32 nm Fe3Si was deposited onto Si(111) substrate by molecular beam epitaxy at 260 °C. Transmission electron microscopy (TEM) measurements demonstrated that the film thickness increases by ∼19 % at 350 °C annealing without changing the phase composition. The polycrystalline -FeSi sublayer was formed on the interface at 450 °C annealing. Further annealing at 550 °C led to the ∼ 80 nm polycrystalline film formation containing the crystallites of -FeSi, Fe5Si3, and β-FeSi2 phases.
KW - SPINTRONICS
KW - GROWTH
UR - http://www.scopus.com/inward/record.url?scp=85021354814&partnerID=8YFLogxK
U2 - 10.1088/1742-6596/857/1/012053
DO - 10.1088/1742-6596/857/1/012053
M3 - Conference article
AN - SCOPUS:85021354814
VL - 857
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
SN - 1742-6588
IS - 1
M1 - 012053
ER -
ID: 12692210