Synthesis of titaniferous films by the method of magnetron sputtering in a discharge with a small anode followed by annealing in nitrogen and air

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Synthesis of titaniferous films by the method of magnetron sputtering in a discharge with a small anode followed by annealing in nitrogen and air. / Zaitsev, O. V.; Gareev, T. I.; Nerushev, O. A. и др.

в: Thermophysics and Aeromechanics, Том 32, № 4, 07.2025, стр. 937-943.

Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование

BibTeX

@article{5686d69e725647688e6b73e5c5cd8969,

title = "Synthesis of titaniferous films by the method of magnetron sputtering in a discharge with a small anode followed by annealing in nitrogen and air",

abstract = "The paper describes a method for the synthesis of titanium nitride films using magnetron sputtering in a small-anode discharge. As a result, the synthesized films exhibit the density lower than the density of films produced by the standard method of magnetron sputtering. The generated coatings were subjected to annealing in oxygen-bearing or nitrogen atmosphere. The resulting films were studied using several characteristics and methods: volt-ampere characteristics of the magnetron discharge and the small anode, images from scanning electron microscopy, x-ray phase analysis, resistometry and spectral measurements for optical transparency. Our study demonstrated that the samples synthesized in a setup with an anode are thicker than those synthesized without anode. They also exhibit a smaller size of crystallites, lower transparency, lower band gap and a higher resistance. Taking into account the unaffected regime of magnetron operation, this difference indicates about a lower film density.",

keywords = "annealing, external anode, magnetron, thin film, titania, titanium nitride",

author = "Zaitsev, {O. V.} and Gareev, {T. I.} and Nerushev, {O. A.} and Sorokin, {D. V.} and Korol{\textquoteright}kov, {I. V.} and Sulyaeva, {V. S.}",

note = "Zaitsev, O.V., Gareev, T.I., Nerushev, O.A. et al. Synthesis of titaniferous films by the method of magnetron sputtering in a discharge with a small anode followed by annealing in nitrogen and air. Thermophys. Aeromech. 32, 937–943 (2025). https://doi.org/10.1134/S0869864325040110 Research was supported by the Russian Science Foundation (Project 23-29-10130) and agreement from the Ministry of Science and Innovation Policy of Novosibirsk region (Agreement No. p-62).",

year = "2025",

month = jul,

doi = "10.1134/S0869864325040110",

language = "English",

volume = "32",

pages = "937--943",

journal = "Thermophysics and Aeromechanics",

issn = "0869-8643",

publisher = "Pleiades Publishing",

number = "4",

}

RIS

TY - JOUR

T1 - Synthesis of titaniferous films by the method of magnetron sputtering in a discharge with a small anode followed by annealing in nitrogen and air

AU - Zaitsev, O. V.

AU - Gareev, T. I.

AU - Nerushev, O. A.

AU - Sorokin, D. V.

AU - Korol’kov, I. V.

AU - Sulyaeva, V. S.

N1 - Zaitsev, O.V., Gareev, T.I., Nerushev, O.A. et al. Synthesis of titaniferous films by the method of magnetron sputtering in a discharge with a small anode followed by annealing in nitrogen and air. Thermophys. Aeromech. 32, 937–943 (2025). https://doi.org/10.1134/S0869864325040110 Research was supported by the Russian Science Foundation (Project 23-29-10130) and agreement from the Ministry of Science and Innovation Policy of Novosibirsk region (Agreement No. p-62).

PY - 2025/7

Y1 - 2025/7

N2 - The paper describes a method for the synthesis of titanium nitride films using magnetron sputtering in a small-anode discharge. As a result, the synthesized films exhibit the density lower than the density of films produced by the standard method of magnetron sputtering. The generated coatings were subjected to annealing in oxygen-bearing or nitrogen atmosphere. The resulting films were studied using several characteristics and methods: volt-ampere characteristics of the magnetron discharge and the small anode, images from scanning electron microscopy, x-ray phase analysis, resistometry and spectral measurements for optical transparency. Our study demonstrated that the samples synthesized in a setup with an anode are thicker than those synthesized without anode. They also exhibit a smaller size of crystallites, lower transparency, lower band gap and a higher resistance. Taking into account the unaffected regime of magnetron operation, this difference indicates about a lower film density.

AB - The paper describes a method for the synthesis of titanium nitride films using magnetron sputtering in a small-anode discharge. As a result, the synthesized films exhibit the density lower than the density of films produced by the standard method of magnetron sputtering. The generated coatings were subjected to annealing in oxygen-bearing or nitrogen atmosphere. The resulting films were studied using several characteristics and methods: volt-ampere characteristics of the magnetron discharge and the small anode, images from scanning electron microscopy, x-ray phase analysis, resistometry and spectral measurements for optical transparency. Our study demonstrated that the samples synthesized in a setup with an anode are thicker than those synthesized without anode. They also exhibit a smaller size of crystallites, lower transparency, lower band gap and a higher resistance. Taking into account the unaffected regime of magnetron operation, this difference indicates about a lower film density.

KW - annealing

KW - external anode

KW - magnetron

KW - thin film

KW - titania

KW - titanium nitride

UR - https://www.scopus.com/pages/publications/105039148599

UR - https://elibrary.ru/item.asp?id=85549728

UR - https://www.mendeley.com/catalogue/7f71529f-5220-3328-b0dc-b57205dd0579/

U2 - 10.1134/S0869864325040110

DO - 10.1134/S0869864325040110

M3 - Article

VL - 32

SP - 937

EP - 943

JO - Thermophysics and Aeromechanics

JF - Thermophysics and Aeromechanics

SN - 0869-8643

IS - 4

ER -

ID: 77912745