TY - JOUR

T1 - Overview of Integrated Optical Sensors Based on Silicon: Forecasts and Results of the Decade

AU - Tsarev, A. V.

N1 - Funding Information: This work was supported by the Russian Foundation for Basic Research (project no. 19-17-50061). Publisher Copyright: © 2020, Allerton Press, Inc. Copyright: Copyright 2021 Elsevier B.V., All rights reserved.

PY - 2020/7

Y1 - 2020/7

N2 - Silicon photonics is the most important technological platform for creating a variety of functional optical elements, including promising types of optical sensors. Moreover, in recent years, 20% of all publications on silicon photonics are devoted to the development of various versions of optical sensors. Their advantage steams from the combination of high technical parameters with the possibility of mass production using CMOS technology of microelectronics and nanophotonics. A brief description of various technological solutions of the last decade that provide progress in the development of optical sensor characteristics is given. Special attention is paid to new promising sensor designs based on bimodal technology, which promises a significant increase in sensor sensitivity by means of equalizing the group delay of a pair of different optical modes propagating through the waveguide structure. The review will be useful for domestic and foreign researchers working in the field of sensor development.

AB - Silicon photonics is the most important technological platform for creating a variety of functional optical elements, including promising types of optical sensors. Moreover, in recent years, 20% of all publications on silicon photonics are devoted to the development of various versions of optical sensors. Their advantage steams from the combination of high technical parameters with the possibility of mass production using CMOS technology of microelectronics and nanophotonics. A brief description of various technological solutions of the last decade that provide progress in the development of optical sensor characteristics is given. Special attention is paid to new promising sensor designs based on bimodal technology, which promises a significant increase in sensor sensitivity by means of equalizing the group delay of a pair of different optical modes propagating through the waveguide structure. The review will be useful for domestic and foreign researchers working in the field of sensor development.

KW - channel waveguide

KW - grating coupling element

KW - optical resonator

KW - optical sensor

KW - photonic crystal

KW - silicon-on-insulator

KW - slot waveguide

KW - subwavelength grating

KW - Vernier effect

UR - http://www.scopus.com/inward/record.url?scp=85099255484&partnerID=8YFLogxK

UR - https://elibrary.ru/item.asp?id=45044219

U2 - 10.3103/S8756699020040123

DO - 10.3103/S8756699020040123

M3 - Article

AN - SCOPUS:85099255484

VL - 56

SP - 412

EP - 430

JO - Optoelectronics, Instrumentation and Data Processing

JF - Optoelectronics, Instrumentation and Data Processing

SN - 8756-6990

IS - 4

M1 - 13

ER -