Standard

Interaction of accelerated argon cluster ions with a silicon dioxide surface. / Korobeishchikov, N. G.; Stishenko, P. V.; Popenko, Y. A. и др.

Oil and Gas Engineering, OGE 2017. ред. / AV Myshlyavtsev; VA Likholobov; VL Yusha. Том 1876 American Institute of Physics Inc., 2017. 020064 (AIP Conference Proceedings; Том 1876).

Результаты исследований: Публикации в книгах, отчётах, сборниках, трудах конференций › статья в сборнике материалов конференции › научная › Рецензирование

Harvard

Korobeishchikov, NG, Stishenko, PV, Popenko, YA, Roenko, MA & Nikolaev, IV 2017, Interaction of accelerated argon cluster ions with a silicon dioxide surface. в AV Myshlyavtsev, VA Likholobov & VL Yusha (ред.), Oil and Gas Engineering, OGE 2017. Том. 1876, 020064, AIP Conference Proceedings, Том. 1876, American Institute of Physics Inc., Oil and Gas Engineering, OGE 2017, Omsk, Российская Федерация, 24.04.2017. https://doi.org/10.1063/1.4998884

APA

Korobeishchikov, N. G., Stishenko, P. V., Popenko, Y. A., Roenko, M. A., & Nikolaev, I. V. (2017). Interaction of accelerated argon cluster ions with a silicon dioxide surface. в AV. Myshlyavtsev, VA. Likholobov, & VL. Yusha (Ред.), Oil and Gas Engineering, OGE 2017 (Том 1876). [020064] (AIP Conference Proceedings; Том 1876). American Institute of Physics Inc.. https://doi.org/10.1063/1.4998884

Vancouver

Korobeishchikov NG, Stishenko PV, Popenko YA, Roenko MA, Nikolaev IV. Interaction of accelerated argon cluster ions with a silicon dioxide surface. в Myshlyavtsev AV, Likholobov VA, Yusha VL, Редакторы, Oil and Gas Engineering, OGE 2017. Том 1876. American Institute of Physics Inc. 2017. 020064. (AIP Conference Proceedings). doi: 10.1063/1.4998884

Author

Korobeishchikov, N. G. ; Stishenko, P. V. ; Popenko, Y. A. и др. / Interaction of accelerated argon cluster ions with a silicon dioxide surface. Oil and Gas Engineering, OGE 2017. Редактор / AV Myshlyavtsev ; VA Likholobov ; VL Yusha. Том 1876 American Institute of Physics Inc., 2017. (AIP Conference Proceedings).

BibTeX

@inproceedings{f8da5d1b94774fa3afe863be6222c65d,
title = "Interaction of accelerated argon cluster ions with a silicon dioxide surface",
abstract = "Gas cluster ion beams bring new opportunities for diagnostics and modification of materials surfaces. In this work impact of argon clusters on silicon dioxide has been studied by molecular dynamics simulations and experimentally. We have obtained dependencies of crater size and the SiO2 sputtering yield on cluster size and specific energy. High reactive selectivity of sputtered products has been revealed for a high specific energy of clusters. It can cause modification of the target surface layer composition in case of long time irradiation. Peculiarities of experimental and computational data matching have been discussed.",
keywords = "MOLECULAR-DYNAMICS SIMULATIONS, INTERFACE, YIELDS",
author = "Korobeishchikov, {N. G.} and Stishenko, {P. V.} and Popenko, {Y. A.} and Roenko, {M. A.} and Nikolaev, {I. V.}",
note = "Publisher Copyright: {\textcopyright} 2017 Author(s).; Oil and Gas Engineering, OGE 2017 ; Conference date: 24-04-2017",
year = "2017",
month = aug,
day = "23",
doi = "10.1063/1.4998884",
language = "English",
volume = "1876",
series = "AIP Conference Proceedings",
publisher = "American Institute of Physics Inc.",
editor = "AV Myshlyavtsev and VA Likholobov and VL Yusha",
booktitle = "Oil and Gas Engineering, OGE 2017",

}

RIS

TY - GEN

T1 - Interaction of accelerated argon cluster ions with a silicon dioxide surface

AU - Korobeishchikov, N. G.

AU - Stishenko, P. V.

AU - Popenko, Y. A.

AU - Roenko, M. A.

AU - Nikolaev, I. V.

N1 - Publisher Copyright: © 2017 Author(s).

PY - 2017/8/23

Y1 - 2017/8/23

N2 - Gas cluster ion beams bring new opportunities for diagnostics and modification of materials surfaces. In this work impact of argon clusters on silicon dioxide has been studied by molecular dynamics simulations and experimentally. We have obtained dependencies of crater size and the SiO2 sputtering yield on cluster size and specific energy. High reactive selectivity of sputtered products has been revealed for a high specific energy of clusters. It can cause modification of the target surface layer composition in case of long time irradiation. Peculiarities of experimental and computational data matching have been discussed.

AB - Gas cluster ion beams bring new opportunities for diagnostics and modification of materials surfaces. In this work impact of argon clusters on silicon dioxide has been studied by molecular dynamics simulations and experimentally. We have obtained dependencies of crater size and the SiO2 sputtering yield on cluster size and specific energy. High reactive selectivity of sputtered products has been revealed for a high specific energy of clusters. It can cause modification of the target surface layer composition in case of long time irradiation. Peculiarities of experimental and computational data matching have been discussed.

KW - MOLECULAR-DYNAMICS SIMULATIONS

KW - INTERFACE

KW - YIELDS

UR - http://www.scopus.com/inward/record.url?scp=85028831580&partnerID=8YFLogxK

U2 - 10.1063/1.4998884

DO - 10.1063/1.4998884

M3 - Conference contribution

AN - SCOPUS:85028831580

VL - 1876

T3 - AIP Conference Proceedings

BT - Oil and Gas Engineering, OGE 2017

A2 - Myshlyavtsev, AV

A2 - Likholobov, VA

A2 - Yusha, VL

PB - American Institute of Physics Inc.

T2 - Oil and Gas Engineering, OGE 2017

Y2 - 24 April 2017

ER -

ID: 9087681