Результаты исследований: Научные публикации в периодических изданиях › обзорная статья › Рецензирование
Hot electrons in silicon oxide. / Gritsenko, V. A.
в: Physics-Uspekhi, Том 60, № 9, 09.2017, стр. 902-910.Результаты исследований: Научные публикации в периодических изданиях › обзорная статья › Рецензирование
}
TY - JOUR
T1 - Hot electrons in silicon oxide
AU - Gritsenko, V. A.
PY - 2017/9
Y1 - 2017/9
N2 - One particular application of amorphous silicon oxide (SiO2), a material crucial for silicon device technology and design, is as a flash memory tunnel dielectric. The breakdown field of SiO2 exceeds 107 V cmÿ1. Strong electric fields in SiO2 give rise to phenomena that do not occur in crystalline semicon-ductors. In relatively weak electric fields (104ÿ106 Vcmÿ1), the electron distribution function is determined by the scattering of electrons on longitudinal optical phonons. In high fields (in excess of 106 V cmÿ1), the distribution function is determined by electron-acoustic phonon scattering.
AB - One particular application of amorphous silicon oxide (SiO2), a material crucial for silicon device technology and design, is as a flash memory tunnel dielectric. The breakdown field of SiO2 exceeds 107 V cmÿ1. Strong electric fields in SiO2 give rise to phenomena that do not occur in crystalline semicon-ductors. In relatively weak electric fields (104ÿ106 Vcmÿ1), the electron distribution function is determined by the scattering of electrons on longitudinal optical phonons. In high fields (in excess of 106 V cmÿ1), the distribution function is determined by electron-acoustic phonon scattering.
KW - Hot electrons
KW - Optical phonons
KW - Scattering
KW - Silicon oxide
KW - FIELD
KW - optical phonons
KW - DIOXIDE FILMS
KW - NITRIDE
KW - MONTE-CARLO
KW - hot electrons
KW - TRANSPORT
KW - scattering
KW - HOLE INJECTION
KW - silicon oxide
KW - EMISSION
KW - IONIZATION
KW - SCATTERING
KW - SIO2
UR - http://www.scopus.com/inward/record.url?scp=85040973769&partnerID=8YFLogxK
U2 - 10.3367/UFNe.2016.12.038008
DO - 10.3367/UFNe.2016.12.038008
M3 - Review article
AN - SCOPUS:85040973769
VL - 60
SP - 902
EP - 910
JO - Physics-Uspekhi
JF - Physics-Uspekhi
SN - 1063-7869
IS - 9
ER -
ID: 10455258