Результаты исследований: Научные публикации в периодических изданиях › статья по материалам конференции › Рецензирование
Graphene transfer from a copper surface to a silicon substrate. / Smovzh, D. V.; Kostogrud, I. A.; Boyko, E. V. и др.
в: Journal of Physics: Conference Series, Том 1675, № 1, 012098, 15.12.2020.Результаты исследований: Научные публикации в периодических изданиях › статья по материалам конференции › Рецензирование
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TY - JOUR
T1 - Graphene transfer from a copper surface to a silicon substrate
AU - Smovzh, D. V.
AU - Kostogrud, I. A.
AU - Boyko, E. V.
AU - Morozova, M. A.
N1 - Funding Information: Experiments related to the graphene CVD synthesis and subsequent transfer to a silicon substrate were financially supported by IT SB RAS (АААА-А19-119061490008-3), experimental studies of the obtained samples were financially supported by RFBR/Russian Foundation for Basic Research (Project No. 18-29-19099\18). Publisher Copyright: © Published under licence by IOP Publishing Ltd. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2020/12/15
Y1 - 2020/12/15
N2 - The article presents a comparison of two methods of transferring single-layer graphene onto silicon substrates using poly (methyl methacrylate) (PMMA) and thermo-adhesive tape. The continuity of the transferred coating and the quality of the graphene film after the transfer stage were investigated. An analysis of the contaminants formed during the transfer of the graphene surface is carried out. It is shown that when using PMMA for transfer, heating of the samples leads to their damage due to thermal expansion and the formation of indelible impurities on the surface.
AB - The article presents a comparison of two methods of transferring single-layer graphene onto silicon substrates using poly (methyl methacrylate) (PMMA) and thermo-adhesive tape. The continuity of the transferred coating and the quality of the graphene film after the transfer stage were investigated. An analysis of the contaminants formed during the transfer of the graphene surface is carried out. It is shown that when using PMMA for transfer, heating of the samples leads to their damage due to thermal expansion and the formation of indelible impurities on the surface.
UR - http://www.scopus.com/inward/record.url?scp=85098187939&partnerID=8YFLogxK
U2 - 10.1088/1742-6596/1675/1/012098
DO - 10.1088/1742-6596/1675/1/012098
M3 - Conference article
AN - SCOPUS:85098187939
VL - 1675
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
SN - 1742-6588
IS - 1
M1 - 012098
T2 - 5th All-Russian Scientific Conference Thermophysics and Physical Hydrodynamics with the School for Young Scientists, TPH 2020
Y2 - 13 September 2020 through 20 September 2020
ER -
ID: 27331361