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Femtosecond laser radiation pattering of GST thin-film based on structured light. / Fedyaj, Vladislav; Revyakin, Alexander; Terentyev, Vadim и др.
Proceedings of SPIE - The International Society for Optical Engineering. ред. / Minghui Hong; Ting Huang; Yuji Sano; Jianhua Yao. Том 13713 The International Society for Optical Engineering, 2025. 137130I (Proceedings of SPIE - The International Society for Optical Engineering; Том 13713).
Результаты исследований: Публикации в книгах, отчётах, сборниках, трудах конференций › статья в сборнике материалов конференции › научная › Рецензирование
Harvard
Fedyaj, V, Revyakin, A, Terentyev, V
, Simonov, V, Simanchuk, A
, Gervaziev, M, Kharenko, D, Kokhanovskiy, A, Zhizhchenko, A, Okotrub, K, Yakubov, A, Lazarenko, P, Kuchmizhak, A
& Dostovalov, A 2025,
Femtosecond laser radiation pattering of GST thin-film based on structured light. в M Hong, T Huang, Y Sano & J Yao (ред.),
Proceedings of SPIE - The International Society for Optical Engineering. Том. 13713, 137130I, Proceedings of SPIE - The International Society for Optical Engineering, Том. 13713, The International Society for Optical Engineering, SPIE/COS Photonics Asia 2025, Beijing, Китай,
12.10.2025.
https://doi.org/10.1117/12.3076582APA
Fedyaj, V., Revyakin, A., Terentyev, V.
, Simonov, V., Simanchuk, A.
, Gervaziev, M., Kharenko, D., Kokhanovskiy, A., Zhizhchenko, A., Okotrub, K., Yakubov, A., Lazarenko, P., Kuchmizhak, A.
, & Dostovalov, A. (2025).
Femtosecond laser radiation pattering of GST thin-film based on structured light. в M. Hong, T. Huang, Y. Sano, & J. Yao (Ред.),
Proceedings of SPIE - The International Society for Optical Engineering (Том 13713). [137130I] (Proceedings of SPIE - The International Society for Optical Engineering; Том 13713). The International Society for Optical Engineering.
https://doi.org/10.1117/12.3076582Vancouver
Fedyaj V, Revyakin A, Terentyev V
, Simonov V, Simanchuk A
, Gervaziev M и др.
Femtosecond laser radiation pattering of GST thin-film based on structured light. в Hong M, Huang T, Sano Y, Yao J, Редакторы, Proceedings of SPIE - The International Society for Optical Engineering. Том 13713. The International Society for Optical Engineering. 2025. 137130I. (Proceedings of SPIE - The International Society for Optical Engineering). doi: 10.1117/12.3076582
Author
Fedyaj, Vladislav ; Revyakin, Alexander ; Terentyev, Vadim и др. /
Femtosecond laser radiation pattering of GST thin-film based on structured light. Proceedings of SPIE - The International Society for Optical Engineering. Редактор / Minghui Hong ; Ting Huang ; Yuji Sano ; Jianhua Yao. Том 13713 The International Society for Optical Engineering, 2025. (Proceedings of SPIE - The International Society for Optical Engineering).
BibTeX
@inproceedings{cc72e091074e4cb2a250dff0e0d236e4,
title = "Femtosecond laser radiation pattering of GST thin-film based on structured light",
abstract = "Femtosecond laser direct writing is a versatile technique for surface patterning and micro/nanostructure fabrication, offering exceptional flexibility and compatibility with diverse materials. Spatial light modulators (SLMs) further enhance this technology by dynamically shaping laser beams and enabling parallel processing through tailored intensity and phase profiles. In recent years, the patterning of phase-change materials (PCMs) using structured light generated with SLMs has attracted significant attention due to promising applications of PCM in reconfigurable photonics. In this work, we demonstrate the patterning of phase-change material (PCM) thin films using SLM-based structured femtosecond laser irradiation. A multibeam approach was employed to fabricate diverse microstructures on chalcogenide PCMs, including Ge2Sb2Te5 (GST225), Ge1Sb2Te4 (GST124), and Ge1Sb4Te7 (GST147), with precise control over the number of beams and their relative positions as well as the intensity, axial (z) position, and size of each beam. Additionally, we systematically investigate the formation of laser-induced periodic surface structures (LIPSS) on GST225, GST124, and GST147 films and compare their characteristics.",
keywords = "Laser-induced periodic surface structures, phase-change materials, spatial light modulator",
author = "Vladislav Fedyaj and Alexander Revyakin and Vadim Terentyev and Victor Simonov and Andrey Simanchuk and Mikhail Gervaziev and Denis Kharenko and Alexey Kokhanovskiy and Alexey Zhizhchenko and Konstantin Okotrub and Alexey Yakubov and Petr Lazarenko and Aleksandr Kuchmizhak and Alexander Dostovalov",
note = "Vladislav Fedyaj, Alexander Revyakin, Vadim Terentyev, Victor Simonov, Andrey Simanchuk, Mikhail Gervaziev, Denis Kharenko, Alexey Kokhanovskiy, Alexey Zhizhchenko, Konstantin Okotrub, Alexey Yakubov, Petr Lazarenko, Aleksandr Kuchmizhak, and Alexander Dostovalov {"}Femtosecond laser radiation pattering of GST thin-film based on structured light{"}, Proc. SPIE 13713, Advanced Laser Processing and Manufacturing IX, 137130I (19 November 2025); https://doi.org/10.1117/12.3076582 The work was supported by the Russian Science Foundation grant (No. 21-72-20162-P). In the research, we used the equipment of the following Multiple-Access Centres (MAC): MAC of the Far Eastern Federal University (FEFU), MAC {\textquoteleft}{\textquoteleft}High-resolution spectroscopy of gases and condensed matters{\textquoteright}{\textquoteright} at IAE SB RAS, MAC of the Novosibirsk State University (NSU).; SPIE/COS Photonics Asia 2025 ; Conference date: 12-10-2025 Through 14-10-2025",
year = "2025",
month = nov,
day = "19",
doi = "10.1117/12.3076582",
language = "English",
volume = "13713",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "The International Society for Optical Engineering",
editor = "Minghui Hong and Ting Huang and Yuji Sano and Jianhua Yao",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",
address = "United States",
url = "https://spie.org/conferences-and-exhibitions/photonics-asia",
}
RIS
TY - GEN
T1 - Femtosecond laser radiation pattering of GST thin-film based on structured light
AU - Fedyaj, Vladislav
AU - Revyakin, Alexander
AU - Terentyev, Vadim
AU - Simonov, Victor
AU - Simanchuk, Andrey
AU - Gervaziev, Mikhail
AU - Kharenko, Denis
AU - Kokhanovskiy, Alexey
AU - Zhizhchenko, Alexey
AU - Okotrub, Konstantin
AU - Yakubov, Alexey
AU - Lazarenko, Petr
AU - Kuchmizhak, Aleksandr
AU - Dostovalov, Alexander
N1 - Vladislav Fedyaj, Alexander Revyakin, Vadim Terentyev, Victor Simonov, Andrey Simanchuk, Mikhail Gervaziev, Denis Kharenko, Alexey Kokhanovskiy, Alexey Zhizhchenko, Konstantin Okotrub, Alexey Yakubov, Petr Lazarenko, Aleksandr Kuchmizhak, and Alexander Dostovalov "Femtosecond laser radiation pattering of GST thin-film based on structured light", Proc. SPIE 13713, Advanced Laser Processing and Manufacturing IX, 137130I (19 November 2025); https://doi.org/10.1117/12.3076582
The work was supported by the Russian Science Foundation grant (No. 21-72-20162-P). In the research, we used the equipment of the following Multiple-Access Centres (MAC): MAC of the Far Eastern Federal University (FEFU), MAC
‘‘High-resolution spectroscopy of gases and condensed matters’’ at IAE SB RAS, MAC of the Novosibirsk State University (NSU).
PY - 2025/11/19
Y1 - 2025/11/19
N2 - Femtosecond laser direct writing is a versatile technique for surface patterning and micro/nanostructure fabrication, offering exceptional flexibility and compatibility with diverse materials. Spatial light modulators (SLMs) further enhance this technology by dynamically shaping laser beams and enabling parallel processing through tailored intensity and phase profiles. In recent years, the patterning of phase-change materials (PCMs) using structured light generated with SLMs has attracted significant attention due to promising applications of PCM in reconfigurable photonics. In this work, we demonstrate the patterning of phase-change material (PCM) thin films using SLM-based structured femtosecond laser irradiation. A multibeam approach was employed to fabricate diverse microstructures on chalcogenide PCMs, including Ge2Sb2Te5 (GST225), Ge1Sb2Te4 (GST124), and Ge1Sb4Te7 (GST147), with precise control over the number of beams and their relative positions as well as the intensity, axial (z) position, and size of each beam. Additionally, we systematically investigate the formation of laser-induced periodic surface structures (LIPSS) on GST225, GST124, and GST147 films and compare their characteristics.
AB - Femtosecond laser direct writing is a versatile technique for surface patterning and micro/nanostructure fabrication, offering exceptional flexibility and compatibility with diverse materials. Spatial light modulators (SLMs) further enhance this technology by dynamically shaping laser beams and enabling parallel processing through tailored intensity and phase profiles. In recent years, the patterning of phase-change materials (PCMs) using structured light generated with SLMs has attracted significant attention due to promising applications of PCM in reconfigurable photonics. In this work, we demonstrate the patterning of phase-change material (PCM) thin films using SLM-based structured femtosecond laser irradiation. A multibeam approach was employed to fabricate diverse microstructures on chalcogenide PCMs, including Ge2Sb2Te5 (GST225), Ge1Sb2Te4 (GST124), and Ge1Sb4Te7 (GST147), with precise control over the number of beams and their relative positions as well as the intensity, axial (z) position, and size of each beam. Additionally, we systematically investigate the formation of laser-induced periodic surface structures (LIPSS) on GST225, GST124, and GST147 films and compare their characteristics.
KW - Laser-induced periodic surface structures
KW - phase-change materials
KW - spatial light modulator
UR - https://www.scopus.com/pages/publications/105024756589
UR - https://www.mendeley.com/catalogue/8d3b43b0-4885-3fdd-99b8-8a20276281e1/
U2 - 10.1117/12.3076582
DO - 10.1117/12.3076582
M3 - Conference contribution
VL - 13713
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Proceedings of SPIE - The International Society for Optical Engineering
A2 - Hong, Minghui
A2 - Huang, Ting
A2 - Sano, Yuji
A2 - Yao, Jianhua
PB - The International Society for Optical Engineering
T2 - SPIE/COS Photonics Asia 2025
Y2 - 12 October 2025 through 14 October 2025
ER -
