TY - JOUR

T1 - Explosive vaporization of water and propanol on flat and nanostructured microheaters

AU - Kozulin, Igor A.

AU - Kuznetsov, Vladimir V.

PY - 2018/1/1

Y1 - 2018/1/1

N2 - MEMS control systems, such as ink-jet printers, optical switches and valves, use the explosive vaporization of metastable liquid for the rapid phase change. The initial stage of explosive vaporization of water and 2-propanol has been studied experimentally using thin-film microheaters, covered with submicron silicon carbide layer and nanostructured tantalum layer. The main objective of this study is to compare the temperature of nucleation and accumulated vapor volume for flat and nanostructured microheaters for the same fluid and temperature growth rate. The multilayer thin-film resistors with the size of 100×110 μm and 60×64 μm were used in the experiments. Applying the optical method based on measuring of the laser beam intensity reflected from resistor surface, the characteristics of the initial stage of explosive vaporization due to pulse heating were obtained. The dependencies of the temperature of explosive boiling-up on temperature growth rate as well as boiling time on effective heat flux were defined for both microheaters.

AB - MEMS control systems, such as ink-jet printers, optical switches and valves, use the explosive vaporization of metastable liquid for the rapid phase change. The initial stage of explosive vaporization of water and 2-propanol has been studied experimentally using thin-film microheaters, covered with submicron silicon carbide layer and nanostructured tantalum layer. The main objective of this study is to compare the temperature of nucleation and accumulated vapor volume for flat and nanostructured microheaters for the same fluid and temperature growth rate. The multilayer thin-film resistors with the size of 100×110 μm and 60×64 μm were used in the experiments. Applying the optical method based on measuring of the laser beam intensity reflected from resistor surface, the characteristics of the initial stage of explosive vaporization due to pulse heating were obtained. The dependencies of the temperature of explosive boiling-up on temperature growth rate as well as boiling time on effective heat flux were defined for both microheaters.

KW - Boiling

KW - Explosive vaporization

KW - MEMS

KW - Microheater

KW - Nano/micro

KW - Pulse heating

UR - http://www.scopus.com/inward/record.url?scp=85068351332&partnerID=8YFLogxK

U2 - 10.1615/ihtc16.nmt.022907

DO - 10.1615/ihtc16.nmt.022907

M3 - Conference article

AN - SCOPUS:85068351332

VL - 2018-August

SP - 6961

EP - 6967

JO - International Heat Transfer Conference

JF - International Heat Transfer Conference

SN - 2377-424X

T2 - 16th International Heat Transfer Conference, IHTC 2018

Y2 - 10 August 2018 through 15 August 2018

ER -