TY - JOUR

T1 - Experimental study of accelerated argon ion-cluster beams

AU - Korobeishchikov, N. G.

AU - Kalyada, V. V.

AU - Shmakov, A. A.

AU - Shul'zhenko, G. I.

N1 - Funding Information: Acknowledgments. This study was supported by the Ministry of Education and Science of the Russian Federation (agreement no. 14.V37.21.1860, state con tract no. 3.749.2011). Copyright: Copyright 2014 Elsevier B.V., All rights reserved.

PY - 2014/1

Y1 - 2014/1

N2 - The formation of accelerated vapor-phase argon beams has been analyzed experimentally with the aim of developing a laboratory bench for ion-cluster modification of materials. Accelerated argon-cluster beams with energies up to 22 keV and intensities up to 6 × 1013 ions/(cm2 s) have been produced at an average size of cluster ions up to 1013 atoms/cluster. The size distributions of ions in an accelerated ion-cluster beam have been investigated by the retarding-potential method at different stagnation pressures. It is shown that the mass composition of an ion-cluster beam depends on the conditions of ion-beam formation.

AB - The formation of accelerated vapor-phase argon beams has been analyzed experimentally with the aim of developing a laboratory bench for ion-cluster modification of materials. Accelerated argon-cluster beams with energies up to 22 keV and intensities up to 6 × 1013 ions/(cm2 s) have been produced at an average size of cluster ions up to 1013 atoms/cluster. The size distributions of ions in an accelerated ion-cluster beam have been investigated by the retarding-potential method at different stagnation pressures. It is shown that the mass composition of an ion-cluster beam depends on the conditions of ion-beam formation.

UR - http://www.scopus.com/inward/record.url?scp=84893954118&partnerID=8YFLogxK

U2 - 10.1134/S1063785014010076

DO - 10.1134/S1063785014010076

M3 - Article

AN - SCOPUS:84893954118

VL - 40

SP - 25

EP - 28

JO - Technical Physics Letters

JF - Technical Physics Letters

SN - 1063-7850

IS - 1

ER -