TY - JOUR

T1 - Effect of Annealing on the Lateral Homogeneity of Ti/InAlAs Schottky Barriers

AU - Genze, I. Yu

AU - Aksenov, M. S.

AU - Dmitriev, D. V.

PY - 2024/10/14

Y1 - 2024/10/14

N2 - The authors study the effect the temperature (300–450°C) and period (0–20 min) of annealing have on the parameters (barrier height and ideality factor) and homogeneity of Au/Pt/Ti/i(n)‒In0.52Al0.48As(001) Schottky barriers. The homogeneity of the Schottky barriers is determined by analyzing the temperature dependences of their parameters in the range of 80–350 K and the Richardson plots in the Tung model.

AB - The authors study the effect the temperature (300–450°C) and period (0–20 min) of annealing have on the parameters (barrier height and ideality factor) and homogeneity of Au/Pt/Ti/i(n)‒In0.52Al0.48As(001) Schottky barriers. The homogeneity of the Schottky barriers is determined by analyzing the temperature dependences of their parameters in the range of 80–350 K and the Richardson plots in the Tung model.

KW - InAlAs

KW - I‒V characteristic

KW - Schottky barrier

KW - Tung model

KW - inhomogeneity

UR - https://www.mendeley.com/catalogue/686c6655-82c5-3ea1-aa31-8aaf049e1496/

UR - https://www.scopus.com/record/display.uri?eid=2-s2.0-85206353627&origin=inward&txGid=a1cb2588f77dbbd7915cb1969927d6d9

U2 - 10.1134/S1062873824707736

DO - 10.1134/S1062873824707736

M3 - Article

VL - 88

SP - 1485

EP - 1489

JO - Bulletin of the Russian Academy of Sciences: Physics

JF - Bulletin of the Russian Academy of Sciences: Physics

SN - 1062-8738

IS - 9

ER -