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Critical conditions for SiGe island formation during Ge deposition on Si(100) at high temperatures. / Shklyaev, A. A.; Budazhapova, A. E.
в: Materials Science in Semiconductor Processing, Том 57, 01.01.2017, стр. 18-23.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
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TY - JOUR
T1 - Critical conditions for SiGe island formation during Ge deposition on Si(100) at high temperatures
AU - Shklyaev, A. A.
AU - Budazhapova, A. E.
PY - 2017/1/1
Y1 - 2017/1/1
N2 - The strain relaxation during the Ge growth on Si(100) occurs vikia surface diffusion and Si-Ge intermixing at temperatures below 800 °C. The Ge diffusion into the Si substrate is an additional process at higher temperatures. We found that, if its rate is higher than the Ge deposition rate, the island formation is not realized. We determined the critical Ge deposition rate as a function of the temperature in the range of 840–960 °C, at which the dynamic equilibrium between the growth of islands and their decay through the diffusion takes place. The islands grown in the conditions close to the dynamic equilibrium are ordered with a distance between them of about 1 µm and they form a smoothed surface morphology. These are indicative of the surface layer strain uniformity. The islands have a SiGe composition which, in the direction parallel to the sample surface, is more uniform in comparison with the islands grown at lower temperatures. The results show that the use of high temperatures essentially improves the conditions for the heterostructure self-organization.
AB - The strain relaxation during the Ge growth on Si(100) occurs vikia surface diffusion and Si-Ge intermixing at temperatures below 800 °C. The Ge diffusion into the Si substrate is an additional process at higher temperatures. We found that, if its rate is higher than the Ge deposition rate, the island formation is not realized. We determined the critical Ge deposition rate as a function of the temperature in the range of 840–960 °C, at which the dynamic equilibrium between the growth of islands and their decay through the diffusion takes place. The islands grown in the conditions close to the dynamic equilibrium are ordered with a distance between them of about 1 µm and they form a smoothed surface morphology. These are indicative of the surface layer strain uniformity. The islands have a SiGe composition which, in the direction parallel to the sample surface, is more uniform in comparison with the islands grown at lower temperatures. The results show that the use of high temperatures essentially improves the conditions for the heterostructure self-organization.
KW - Dynamic equilibrium
KW - Ge MBE on Si(100)
KW - High-temperature growth
KW - Self-organization
KW - Strain relaxation
KW - 001 SURFACE
KW - SILICON
KW - SI(001)
KW - SI(111)
KW - MICROSCOPY
KW - GE/SI(100) ISLANDS
KW - QUANTUM DOTS
KW - LAYERS
KW - GERMANIUM
KW - GROWTH
UR - http://www.scopus.com/inward/record.url?scp=84991628062&partnerID=8YFLogxK
U2 - 10.1016/j.mssp.2016.09.033
DO - 10.1016/j.mssp.2016.09.033
M3 - Article
AN - SCOPUS:84991628062
VL - 57
SP - 18
EP - 23
JO - Materials Science in Semiconductor Processing
JF - Materials Science in Semiconductor Processing
SN - 1369-8001
ER -
ID: 10351826