Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
Controlling the Si(001) Surface Morphology upon Thermal Annealing in a Vacuum Chamber. / Rodyakina, E. E.; Sitnikov, S. V.; Rogilo, D. I. и др.
в: Russian Microelectronics, Том 47, № 6, 01.11.2018, стр. 365-370.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
}
TY - JOUR
T1 - Controlling the Si(001) Surface Morphology upon Thermal Annealing in a Vacuum Chamber
AU - Rodyakina, E. E.
AU - Sitnikov, S. V.
AU - Rogilo, D. I.
AU - Latyshev, A. V.
N1 - Publisher Copyright: © 2018, Pleiades Publishing, Ltd.
PY - 2018/11/1
Y1 - 2018/11/1
N2 - Abstract: The effect of homoepitaxial Si(001) growth on the surface morphology during the annealing of a substrate by passing a direct current is examined by in situ high-vacuum reflection electron microscopy at a temperature of 1100°С and ex situ atomic force microscopy. The nonmonotonic dependence of the average distance between step bunch on the atomic flow to the surface under the growth conditions and the monotonic behavior under the sublimation conditions are established. The increase in the average distance between pairs of inclined steps between the bunches at an external atomic flow comparable with the flow of atoms evaporated from the surface during sublimation is found.
AB - Abstract: The effect of homoepitaxial Si(001) growth on the surface morphology during the annealing of a substrate by passing a direct current is examined by in situ high-vacuum reflection electron microscopy at a temperature of 1100°С and ex situ atomic force microscopy. The nonmonotonic dependence of the average distance between step bunch on the atomic flow to the surface under the growth conditions and the monotonic behavior under the sublimation conditions are established. The increase in the average distance between pairs of inclined steps between the bunches at an external atomic flow comparable with the flow of atoms evaporated from the surface during sublimation is found.
UR - http://www.scopus.com/inward/record.url?scp=85063091157&partnerID=8YFLogxK
U2 - 10.1134/S1063739718060069
DO - 10.1134/S1063739718060069
M3 - Article
AN - SCOPUS:85063091157
VL - 47
SP - 365
EP - 370
JO - Russian Microelectronics
JF - Russian Microelectronics
SN - 1063-7397
IS - 6
ER -
ID: 18950621