Результаты исследований: Научные публикации в периодических изданиях › статья по материалам конференции › Рецензирование
Comparing the methods of copper substrate polishing for CVD graphene synthesis. / Kostogrud, I. A.; Boyko, E. V.; Matochkin, P. E. и др.
в: Journal of Physics: Conference Series, Том 2057, № 1, 012121, 08.11.2021.Результаты исследований: Научные публикации в периодических изданиях › статья по материалам конференции › Рецензирование
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TY - JOUR
T1 - Comparing the methods of copper substrate polishing for CVD graphene synthesis
AU - Kostogrud, I. A.
AU - Boyko, E. V.
AU - Matochkin, P. E.
AU - Sorokin, D. V.
N1 - Publisher Copyright: © 2021 Institute of Physics Publishing. All rights reserved.
PY - 2021/11/8
Y1 - 2021/11/8
N2 - This paper presents a comparison of chemical and plasma electrolyte polishing methods for preparing a copper substrate for graphene synthesis by chemical vapour deposition. It is shown that in order to achieve the most uniform morphology of the surface of the copper substrate, it is preferable to use the electrolyte-plasma polishing method. With its help, the proportion of multilayer regions in the graphene coating obtained as a result of CVD synthesis decreases. The obtained results may serve a recommendation for creating a graphene coating with specified parameters.
AB - This paper presents a comparison of chemical and plasma electrolyte polishing methods for preparing a copper substrate for graphene synthesis by chemical vapour deposition. It is shown that in order to achieve the most uniform morphology of the surface of the copper substrate, it is preferable to use the electrolyte-plasma polishing method. With its help, the proportion of multilayer regions in the graphene coating obtained as a result of CVD synthesis decreases. The obtained results may serve a recommendation for creating a graphene coating with specified parameters.
UR - http://www.scopus.com/inward/record.url?scp=85119627466&partnerID=8YFLogxK
U2 - 10.1088/1742-6596/2057/1/012121
DO - 10.1088/1742-6596/2057/1/012121
M3 - Conference article
AN - SCOPUS:85119627466
VL - 2057
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
SN - 1742-6588
IS - 1
M1 - 012121
T2 - 6th All-Russian Conference on Thermophysics and Physical Hydrodynamics, TPH 2021 and the School for Young Scientists on Thermal Physics and Physical Hydrodynamics: Modern Challenges, TPHMC2021
Y2 - 22 August 2021 through 29 August 2021
ER -
ID: 34758982