TY - GEN

T1 - Application of Vernier Principle to Photoelectric Autocollimator for Improvement of Accuracy, Angular Range and Speed

AU - Golitsyn, Andrey V.

AU - Golitsyn, Alexandr A.

AU - Dmitriev, Alexander K.

AU - Seyfi, Natalia A.

N1 - Publisher Copyright: © 2021 IEEE.

PY - 2021

Y1 - 2021

N2 - An improvement of photoelectric autocollimator is proposed. Periodical structures of light source grating and photodetector array form an additional combination signal of Vernier type. The solution promises to exceed the limits of accuracy, angular range and speed imposed by finite number of photodetector elements. Calculation of a lens for trial version of the device with specified characteristics necessary to ensure measurement accuracy shows attainability of F-Theta distortion within 10-6%-tenths of nanometres, without taking manufacturing tolerances into consideration. It is significantly less than value of light spot within diffraction limit (3 microns) and typical pixel pitch of the linear or matrix sensor. The transverse aberrations also seem hard attainable lower than the diffraction limit. The processing speed of designed trial version of autocollimator is about 30 measurements per second and if needed it can be increased in case of using digital camera with higher frame rate in the device construction.

AB - An improvement of photoelectric autocollimator is proposed. Periodical structures of light source grating and photodetector array form an additional combination signal of Vernier type. The solution promises to exceed the limits of accuracy, angular range and speed imposed by finite number of photodetector elements. Calculation of a lens for trial version of the device with specified characteristics necessary to ensure measurement accuracy shows attainability of F-Theta distortion within 10-6%-tenths of nanometres, without taking manufacturing tolerances into consideration. It is significantly less than value of light spot within diffraction limit (3 microns) and typical pixel pitch of the linear or matrix sensor. The transverse aberrations also seem hard attainable lower than the diffraction limit. The processing speed of designed trial version of autocollimator is about 30 measurements per second and if needed it can be increased in case of using digital camera with higher frame rate in the device construction.

KW - autocollimator

KW - F-Tan distortion

KW - F-Theta distortion

KW - periodical structures

KW - photosensor

KW - Vernier-Type

UR - http://www.scopus.com/inward/record.url?scp=85124286889&partnerID=8YFLogxK

UR - https://www.mendeley.com/catalogue/3ffaf976-7714-3f64-849c-d30b6b8cdc9c/

U2 - 10.1109/APEIE52976.2021.9647436

DO - 10.1109/APEIE52976.2021.9647436

M3 - Conference contribution

AN - SCOPUS:85124286889

SN - 9781665434089

T3 - Proceedings of the 2021 15th International Scientific-Technical Conference on Actual Problems of Electronic Instrument Engineering, APEIE 2021

SP - 674

EP - 677

BT - Proceedings of the 2021 15th International Scientific-Technical Conference on Actual Problems of Electronic Instrument Engineering, APEIE 2021

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 15th International Scientific-Technical Conference on Actual Problems of Electronic Instrument Engineering, APEIE 2021

Y2 - 19 November 2021 through 21 November 2021

ER -