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Advacancy-mediated atomic steps kinetics and two-dimensional negative island nucleation on ultra-flat Si(111) surface. / Sitnikov, S. V.; Latyshev, A. V.; Kosolobov, S. S.
в: Journal of Crystal Growth, Том 457, 01.01.2017, стр. 196-201.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
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TY - JOUR
T1 - Advacancy-mediated atomic steps kinetics and two-dimensional negative island nucleation on ultra-flat Si(111) surface
AU - Sitnikov, S. V.
AU - Latyshev, A. V.
AU - Kosolobov, S. S.
PY - 2017/1/1
Y1 - 2017/1/1
N2 - We have investigated Si(111) surface morphology transformations during high-temperature sublimation and oxygen treatments by means of in situ ultrahigh vacuum reflection electron microscopy. By analyzing atomic steps kinetics and two-dimensional negative (vacancy) islands nucleation on ultra-flat Si(111) surface with extremely wide (up to 120 μm in size) terraces we have estimated the activation energy associated with the surface-bulk vacancy exchange processes. We show that atomic steps motion and negative islands nucleation kinetics at temperatures above 1180 °C can be described by the step-flow model of Burton, Cabrera and Frank taking into account advacancies formation. By comparing experimental results with predictions of model we conclude that the surface mass transport at temperatures above 1180 °C is governed by surface vacancies nucleation and interaction with atomic steps rather than via adatoms surface diffusion.
AB - We have investigated Si(111) surface morphology transformations during high-temperature sublimation and oxygen treatments by means of in situ ultrahigh vacuum reflection electron microscopy. By analyzing atomic steps kinetics and two-dimensional negative (vacancy) islands nucleation on ultra-flat Si(111) surface with extremely wide (up to 120 μm in size) terraces we have estimated the activation energy associated with the surface-bulk vacancy exchange processes. We show that atomic steps motion and negative islands nucleation kinetics at temperatures above 1180 °C can be described by the step-flow model of Burton, Cabrera and Frank taking into account advacancies formation. By comparing experimental results with predictions of model we conclude that the surface mass transport at temperatures above 1180 °C is governed by surface vacancies nucleation and interaction with atomic steps rather than via adatoms surface diffusion.
KW - A1. Diffusion
KW - A1. Mass transfer
KW - A1. Surface processes
KW - B2. Semiconducting silicon
KW - VICINAL SURFACES
KW - SILICON
KW - SUBLIMATION
KW - REFLECTION ELECTRON-MICROSCOPY
KW - Mass transfer
KW - TEMPERATURE
KW - PHASE-TRANSITION
KW - GROWTH
KW - Semiconducting silicon
KW - SCANNING-TUNNELING-MICROSCOPY
KW - Surface processes
KW - Diffusion
KW - IN-SITU
KW - TRANSFORMATIONS
UR - http://www.scopus.com/inward/record.url?scp=84973131445&partnerID=8YFLogxK
U2 - 10.1016/j.jcrysgro.2016.05.048
DO - 10.1016/j.jcrysgro.2016.05.048
M3 - Article
AN - SCOPUS:84973131445
VL - 457
SP - 196
EP - 201
JO - Journal of Crystal Growth
JF - Journal of Crystal Growth
SN - 0022-0248
ER -
ID: 10352102