Thermochemical study of fluorinated magnesium BETA-DIKETONATE complexes: development of a promising class of volatile MOCVD precursors

Research output: Contribution to journal › Article › peer-review

Original language	English
Article number	107659
Number of pages	13
Journal	Journal of Chemical Thermodynamics
Volume	216
DOIs	https://doi.org/10.1016/j.jct.2026.107659
Publication status	Published - Jul 2026

DSC, Magnesium beta-diketonates, Melting and evaporation processes, Static method with glass membrane gauge-manometer, Thermodynamic characteristics, Thermodynamic simulation, Vapor pressure

ID: 75625366