Research output: Contribution to journal › Article › peer-review
Thermal Behavior of Mixtures of Zirconium(IV) and Yttrium(III) Dipivaloylmethanates. / Turgambaeva, A. E.; Zherikova, K. V.; Mosyagina, S. A. et al.
In: Russian Journal of Applied Chemistry, Vol. 94, No. 4, 04.2021, p. 450-456.Research output: Contribution to journal › Article › peer-review
}
TY - JOUR
T1 - Thermal Behavior of Mixtures of Zirconium(IV) and Yttrium(III) Dipivaloylmethanates
AU - Turgambaeva, A. E.
AU - Zherikova, K. V.
AU - Mosyagina, S. A.
AU - Krisyuk, V. V.
AU - Lukashov, V. V.
AU - Igumenov, I. K.
N1 - Funding Information: The study was financially supported by the Russian Foundation for Basic Research (project no. 16-19-10325). Funding Information: The authors are grateful to Cand. Sci. (Chem.) A.S. Yunoshev (Lavrent?ev Institute of Hydrodynamics, Siberian Branch, Russian Academy of Sciences) for performing X-ray diffraction analysis. Publisher Copyright: © 2021, Pleiades Publishing, Ltd.
PY - 2021/4
Y1 - 2021/4
N2 - The thermal properties of individual precursors, zirconium(IV) and yttrium(III) dipivaloylmethanates, and of their mixtures [Zr(thd)4–Y(thd)3, Hthd = 2,2,6,6-tetramethylheptane-3,5-dione] used for preparing mixed oxide films by chemical vapor deposition were studied in the condensed and gas phases. In the condensed phase, the vaporization rate of both individual compounds and their mixtures considerably exceeds the decomposition rate. The vaporization, thermal stability of the vapors, and thermal decomposition of the compounds in a vacuum and in the presence of oxygen were studied using mass-spectrometric monitoring of the gas phase composition. Comparison of the thermal behavior of individual Zr(thd)4 and Y(thd)3, heated in separate vaporizers of the mass spectrometer inlet system, and of their mixtures with different Zr(thd)4 to Y(thd)3 ratios reveals no chemical interaction between the precursors in the examined temperature interval.
AB - The thermal properties of individual precursors, zirconium(IV) and yttrium(III) dipivaloylmethanates, and of their mixtures [Zr(thd)4–Y(thd)3, Hthd = 2,2,6,6-tetramethylheptane-3,5-dione] used for preparing mixed oxide films by chemical vapor deposition were studied in the condensed and gas phases. In the condensed phase, the vaporization rate of both individual compounds and their mixtures considerably exceeds the decomposition rate. The vaporization, thermal stability of the vapors, and thermal decomposition of the compounds in a vacuum and in the presence of oxygen were studied using mass-spectrometric monitoring of the gas phase composition. Comparison of the thermal behavior of individual Zr(thd)4 and Y(thd)3, heated in separate vaporizers of the mass spectrometer inlet system, and of their mixtures with different Zr(thd)4 to Y(thd)3 ratios reveals no chemical interaction between the precursors in the examined temperature interval.
KW - MOCVD precursors
KW - thermal properties
KW - yttrium dipivaloylmethanate
KW - zirconium dipivaloylmethanate
UR - http://www.scopus.com/inward/record.url?scp=85108187017&partnerID=8YFLogxK
U2 - 10.1134/S1070427221040042
DO - 10.1134/S1070427221040042
M3 - Article
AN - SCOPUS:85108187017
VL - 94
SP - 450
EP - 456
JO - Russian Journal of Applied Chemistry
JF - Russian Journal of Applied Chemistry
SN - 1070-4272
IS - 4
ER -
ID: 34174576