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The initial stages of atomic force microscope based local anodic oxidation of silicon

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Nano-Superconduction Laboratory

DOI

https://doi.org/10.1063/1.5007914
Final published version

A. S. Kozhukhov
D. V. Scheglov
L. I. Fedina
A. V. Latyshev

Original language	English
Article number	025113
Number of pages	6
Journal	AIP Advances
Volume	8
Issue number	2
DOIs	https://doi.org/10.1063/1.5007914
Publication status	Published - 1 Feb 2018

Research areas

SCANNING TUNNELING MICROSCOPE, SURFACE, NANOOXIDATION, FABRICATION, FILMS

OECD FOS+WOS

ID: 10420942