Synthesis of titaniferous films by the method of magnetron sputtering in a discharge with a small anode followed by annealing in nitrogen and air › Research Explorer

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Synthesis of titaniferous films by the method of magnetron sputtering in a discharge with a small anode followed by annealing in nitrogen and air

Research output: Contribution to journal › Article › peer-review

DOI

https://doi.org/10.1134/S0869864325040110
Final published version

O. V. Zaitsev
T. I. Gareev
O. A. Nerushev
D. V. Sorokin
I. V. Korol’kov
V. S. Sulyaeva

Original language	English
Pages (from-to)	937-943
Number of pages	7
Journal	Thermophysics and Aeromechanics
Volume	32
Issue number	4
DOIs	https://doi.org/10.1134/S0869864325040110
Publication status	Published - Jul 2025

OECD FOS+WOS

2.03.DT THERMODYNAMICS

Research areas

annealing, external anode, magnetron, thin film, titania, titanium nitride

ID: 77912745