Standard

Silicon and silicon nitride cylindrical microresonators made of optical fibers with sputter deposition. / Makarova, Natalya A; Terentyev, Vadim S; Vatnik, Ilya D.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 13244, 1324406, 2024.

Research output: Contribution to journal › Conference article › peer-review

Harvard

Makarova, NA, Terentyev, VS & Vatnik, ID 2024, 'Silicon and silicon nitride cylindrical microresonators made of optical fibers with sputter deposition', Proceedings of SPIE - The International Society for Optical Engineering, vol. 13244, 1324406. https://doi.org/10.1117/12.3036300

APA

Makarova, N. A., Terentyev, V. S., & Vatnik, I. D. (2024). Silicon and silicon nitride cylindrical microresonators made of optical fibers with sputter deposition. Proceedings of SPIE - The International Society for Optical Engineering, 13244, [1324406]. https://doi.org/10.1117/12.3036300

Vancouver

Makarova NA, Terentyev VS, Vatnik ID. Silicon and silicon nitride cylindrical microresonators made of optical fibers with sputter deposition. Proceedings of SPIE - The International Society for Optical Engineering. 2024;13244:1324406. doi: 10.1117/12.3036300

Author

Makarova, Natalya A ; Terentyev, Vadim S ; Vatnik, Ilya D. / Silicon and silicon nitride cylindrical microresonators made of optical fibers with sputter deposition. In: Proceedings of SPIE - The International Society for Optical Engineering. 2024 ; Vol. 13244.

BibTeX

@article{f39da862206d46b78e4c001e11079f87,
title = "Silicon and silicon nitride cylindrical microresonators made of optical fibers with sputter deposition",
abstract = "A cylindrical microresonator based on standard silica optical fibers is a promising platform for nonlinear devices such as low-repetition rate frequency comb generators. Though, enlarged mode volumes lead to higher pump powers and thirdorder nonlinearity level together with the stricter requirements on low propagation losses in order to achieve effective fourwave nonlinear interactions. We consider sputter deposition of thin films with higher nonlinear refractive index made of silicon and silicon nitride layers to enhance the nonlinearity within the microcavity. We inspect the variations of the cylinder radius that arise during the deposition and determine the quality factors achievable.",
keywords = "cylindrical microresonator, effective radius variation, optical fiber, quality factor, silicon, silicon nitride, snap, sputter deposition",
author = "Makarova, {Natalya A} and Terentyev, {Vadim S} and Vatnik, {Ilya D}",
note = "The study was supported by the Russian Science Foundation (22-12-20015), and by the Government of the Novosibirsk Region https://rscf.ru/project/22-12-20015/.; Nano-optoelectronics and Micro/Nano-photonics X 2024 ; Conference date: 13-10-2024 Through 15-10-2024",
year = "2024",
doi = "10.1117/12.3036300",
language = "English",
volume = "13244",
journal = "Proceedings of SPIE - The International Society for Optical Engineering",
issn = "0277-786X",
publisher = "SPIE",

}

RIS

TY - JOUR

T1 - Silicon and silicon nitride cylindrical microresonators made of optical fibers with sputter deposition

AU - Makarova, Natalya A

AU - Terentyev, Vadim S

AU - Vatnik, Ilya D

N1 - Conference code: 10

PY - 2024

Y1 - 2024

N2 - A cylindrical microresonator based on standard silica optical fibers is a promising platform for nonlinear devices such as low-repetition rate frequency comb generators. Though, enlarged mode volumes lead to higher pump powers and thirdorder nonlinearity level together with the stricter requirements on low propagation losses in order to achieve effective fourwave nonlinear interactions. We consider sputter deposition of thin films with higher nonlinear refractive index made of silicon and silicon nitride layers to enhance the nonlinearity within the microcavity. We inspect the variations of the cylinder radius that arise during the deposition and determine the quality factors achievable.

AB - A cylindrical microresonator based on standard silica optical fibers is a promising platform for nonlinear devices such as low-repetition rate frequency comb generators. Though, enlarged mode volumes lead to higher pump powers and thirdorder nonlinearity level together with the stricter requirements on low propagation losses in order to achieve effective fourwave nonlinear interactions. We consider sputter deposition of thin films with higher nonlinear refractive index made of silicon and silicon nitride layers to enhance the nonlinearity within the microcavity. We inspect the variations of the cylinder radius that arise during the deposition and determine the quality factors achievable.

KW - cylindrical microresonator

KW - effective radius variation

KW - optical fiber

KW - quality factor

KW - silicon

KW - silicon nitride

KW - snap

KW - sputter deposition

UR - https://www.scopus.com/record/display.uri?eid=2-s2.0-85212416729&origin=inward&txGid=f1cb1f6e83ce093794f78192a674ac26

UR - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/13244/3036300/Silicon-and-silicon-nitride-cylindrical-microresonators-made-of-optical-fibers/10.1117/12.3036300.full

UR - https://www.mendeley.com/catalogue/4c971b86-4710-3337-8f22-88741ca8fb99/

U2 - 10.1117/12.3036300

DO - 10.1117/12.3036300

M3 - Conference article

VL - 13244

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

SN - 0277-786X

M1 - 1324406

T2 - Nano-optoelectronics and Micro/Nano-photonics X 2024

Y2 - 13 October 2024 through 15 October 2024

ER -

ID: 61412879