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Short-Range Order in Amorphous and Crystalline Ferroelectric Hf0.5Zr0.5O2. / Erenburg, S. B.; Trubina, S. V.; Kvashnina, K. O. et al.

In: Journal of Experimental and Theoretical Physics, Vol. 126, No. 6, 01.06.2018, p. 816-824.

Research output: Contribution to journal › Article › peer-review

Harvard

Erenburg, SB, Trubina, SV, Kvashnina, KO, Kruchinin, VN, Gritsenko, VV, Chernikova, AG & Markeev, AM 2018, 'Short-Range Order in Amorphous and Crystalline Ferroelectric Hf0.5Zr0.5O2', Journal of Experimental and Theoretical Physics, vol. 126, no. 6, pp. 816-824. https://doi.org/10.1134/S1063776118060031

APA

Erenburg, S. B., Trubina, S. V., Kvashnina, K. O., Kruchinin, V. N., Gritsenko, V. V., Chernikova, A. G., & Markeev, A. M. (2018). Short-Range Order in Amorphous and Crystalline Ferroelectric Hf0.5Zr0.5O2. Journal of Experimental and Theoretical Physics, 126(6), 816-824. https://doi.org/10.1134/S1063776118060031

Vancouver

Erenburg SB, Trubina SV, Kvashnina KO, Kruchinin VN, Gritsenko VV, Chernikova AG et al. Short-Range Order in Amorphous and Crystalline Ferroelectric Hf0.5Zr0.5O2. Journal of Experimental and Theoretical Physics. 2018 Jun 1;126(6):816-824. doi: 10.1134/S1063776118060031

Author

Erenburg, S. B. ; Trubina, S. V. ; Kvashnina, K. O. et al. / Short-Range Order in Amorphous and Crystalline Ferroelectric Hf0.5Zr0.5O2. In: Journal of Experimental and Theoretical Physics. 2018 ; Vol. 126, No. 6. pp. 816-824.

BibTeX

@article{550ee55213c846428c43c66838cd50d3,
title = "Short-Range Order in Amorphous and Crystalline Ferroelectric Hf0.5Zr0.5O2",
abstract = "The microstructures of amorphous and polycrystalline ferroelectric Hf0.5Zr0.5O2 films are studied by X-ray spectroscopy and ellipsometry. EXAFS spectra demonstrate that the amorphous film consists of an “incompletely mixed” solid solution of metallic oxides HfO2 and ZrO2. After rapid thermal annealing, the mixed Hf0.5Zr0.5O2 oxide films have a more ordered polycrystalline structure, and individual Hf and Zr monoxide islands are formed in the films. These islands are several nanometers in size and have a structure that is similar to the monoclinic structure of HfO2 and ZrO2. The presence of the HfO2 and ZrO2 phases in the Hf0.5Zr0.5O2 films is also detected by ellipsometry.",
author = "Erenburg, {S. B.} and Trubina, {S. V.} and Kvashnina, {K. O.} and Kruchinin, {V. N.} and Gritsenko, {V. V.} and Chernikova, {A. G.} and Markeev, {A. M.}",
year = "2018",
month = jun,
day = "1",
doi = "10.1134/S1063776118060031",
language = "English",
volume = "126",
pages = "816--824",
journal = "Journal of Experimental and Theoretical Physics",
issn = "1063-7761",
publisher = "Maik Nauka-Interperiodica Publishing",
number = "6",

}

RIS

TY - JOUR

T1 - Short-Range Order in Amorphous and Crystalline Ferroelectric Hf0.5Zr0.5O2

AU - Erenburg, S. B.

AU - Trubina, S. V.

AU - Kvashnina, K. O.

AU - Kruchinin, V. N.

AU - Gritsenko, V. V.

AU - Chernikova, A. G.

AU - Markeev, A. M.

PY - 2018/6/1

Y1 - 2018/6/1

N2 - The microstructures of amorphous and polycrystalline ferroelectric Hf0.5Zr0.5O2 films are studied by X-ray spectroscopy and ellipsometry. EXAFS spectra demonstrate that the amorphous film consists of an “incompletely mixed” solid solution of metallic oxides HfO2 and ZrO2. After rapid thermal annealing, the mixed Hf0.5Zr0.5O2 oxide films have a more ordered polycrystalline structure, and individual Hf and Zr monoxide islands are formed in the films. These islands are several nanometers in size and have a structure that is similar to the monoclinic structure of HfO2 and ZrO2. The presence of the HfO2 and ZrO2 phases in the Hf0.5Zr0.5O2 films is also detected by ellipsometry.

AB - The microstructures of amorphous and polycrystalline ferroelectric Hf0.5Zr0.5O2 films are studied by X-ray spectroscopy and ellipsometry. EXAFS spectra demonstrate that the amorphous film consists of an “incompletely mixed” solid solution of metallic oxides HfO2 and ZrO2. After rapid thermal annealing, the mixed Hf0.5Zr0.5O2 oxide films have a more ordered polycrystalline structure, and individual Hf and Zr monoxide islands are formed in the films. These islands are several nanometers in size and have a structure that is similar to the monoclinic structure of HfO2 and ZrO2. The presence of the HfO2 and ZrO2 phases in the Hf0.5Zr0.5O2 films is also detected by ellipsometry.

UR - http://www.scopus.com/inward/record.url?scp=85050401428&partnerID=8YFLogxK

U2 - 10.1134/S1063776118060031

DO - 10.1134/S1063776118060031

M3 - Article

AN - SCOPUS:85050401428

VL - 126

SP - 816

EP - 824

JO - Journal of Experimental and Theoretical Physics

JF - Journal of Experimental and Theoretical Physics

SN - 1063-7761

IS - 6

ER -

ID: 18561801