Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review
Shapes of the micron-sized SiGe islands grown on Si(100) in Dewetting Conditions. / Budazhapova, Anastasia E.; Shklyaev, Alexander A.
2018 19th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM 2018 - Proceedings. Vol. 2018-July IEEE Computer Society, 2018. p. 16-18 8434951.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review
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TY - GEN
T1 - Shapes of the micron-sized SiGe islands grown on Si(100) in Dewetting Conditions
AU - Budazhapova, Anastasia E.
AU - Shklyaev, Alexander A.
PY - 2018/8/13
Y1 - 2018/8/13
N2 - The shape of the islands formed during the Ge deposition on Si(100) surfaces in dewetting conditions is analyzed on the basis of surface layer energy minimization. An analytical expression for the total energy is derived for the sphere segment-shaped islands with contact angles up to 180° with respect to the substrate. It is found that the island shape is determined by the balance between the surface energy of the Si substrate areas located around the islands and the elastic energy of the areas around the island/substrate interface.
AB - The shape of the islands formed during the Ge deposition on Si(100) surfaces in dewetting conditions is analyzed on the basis of surface layer energy minimization. An analytical expression for the total energy is derived for the sphere segment-shaped islands with contact angles up to 180° with respect to the substrate. It is found that the island shape is determined by the balance between the surface energy of the Si substrate areas located around the islands and the elastic energy of the areas around the island/substrate interface.
KW - Island shapes
KW - Solid-state dewetting
KW - Surface layer energy
UR - http://www.scopus.com/inward/record.url?scp=85052377856&partnerID=8YFLogxK
U2 - 10.1109/EDM.2018.8434951
DO - 10.1109/EDM.2018.8434951
M3 - Conference contribution
AN - SCOPUS:85052377856
SN - 9781538650219
VL - 2018-July
SP - 16
EP - 18
BT - 2018 19th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM 2018 - Proceedings
PB - IEEE Computer Society
T2 - 19th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM 2018
Y2 - 29 June 2018 through 3 July 2018
ER -
ID: 16238487