Dostovalov, A. V., 
Wolf, A. A., 
Zlobina, E. A., 
Kablukov, S. I. & 
Babin, S. A., 
1 Jan 2017, 
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII. Neuenschwander, B., Grigoropoulos, CP., Makimura, T. & Raciukaitis, G. (eds.). 
The International Society for Optical Engineering, 
Vol. 10091. 
p. 100910L 6 p. 100910G. (Proceedings of SPIE; vol. 10091).
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review