Chistokhin, I. B.,
Aksenov, M. S.,
Valisheva, N. A.,
Dmitriev, D. V.,
Kovchavtsev, A. P.,
Gutakovskii, A. K.,
Prosvirin, I. P. &
Zhuravlev, K. S.,
1 Feb 2018,
In: Materials Science in Semiconductor Processing. 74,
p. 193-198 6 p.Research output: Contribution to journal › Article › peer-review