Volodin, V. A.,
Kamaev, G. N.,
Yushkov, I. D.,
Krivyakin, G. K.,
Cherkova, S. G. &
Vergnat, M.,
31 Jan 2022,
International Conference on Micro- and Nano-Electronics 2021. Lukichev, V. F. & Rudenko, K. V. (eds.).
SPIE, 121570A. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 12157).
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review