Dostovalov, A. V.,
Wolf, A. A.,
Zlobina, E. A.,
Kablukov, S. I. &
Babin, S. A.,
1 Jan 2017,
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII. Neuenschwander, B., Grigoropoulos, CP., Makimura, T. & Raciukaitis, G. (eds.).
SPIE,
Vol. 10091.
6 p. 100910G. (Proceedings of SPIE; vol. 10091).
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review