Standard

Role of melting, evaporation, and plasma shielding in surface morphology formation during nanosecond laser texturing of silicon. / Vasilev, M M; Rodionov, A A; Shukhov, Yu G et al.

In: Surfaces and Interfaces, Vol. 97, 110008, 15.09.2026.

Research output: Contribution to journal › Article › peer-review

Harvard

Vasilev, MM, Rodionov, AA, Shukhov, YG, Smirnov, NI, Samokhvalov, FA, Giannakis, T, Kandyla, M, Sulyaeva, VS & Starinskiy, SV 2026, 'Role of melting, evaporation, and plasma shielding in surface morphology formation during nanosecond laser texturing of silicon', Surfaces and Interfaces, vol. 97, 110008. https://doi.org/10.1016/j.surfin.2026.110008

APA

Vasilev, M. M., Rodionov, A. A., Shukhov, Y. G., Smirnov, N. I., Samokhvalov, F. A., Giannakis, T., Kandyla, M., Sulyaeva, V. S., & Starinskiy, S. V. (2026). Role of melting, evaporation, and plasma shielding in surface morphology formation during nanosecond laser texturing of silicon. Surfaces and Interfaces, 97, [110008]. https://doi.org/10.1016/j.surfin.2026.110008

Vancouver

Vasilev MM, Rodionov AA, Shukhov YG, Smirnov NI, Samokhvalov FA, Giannakis T et al. Role of melting, evaporation, and plasma shielding in surface morphology formation during nanosecond laser texturing of silicon. Surfaces and Interfaces. 2026 Sept 15;97:110008. doi: 10.1016/j.surfin.2026.110008

Author

Vasilev, M M ; Rodionov, A A ; Shukhov, Yu G et al. / Role of melting, evaporation, and plasma shielding in surface morphology formation during nanosecond laser texturing of silicon. In: Surfaces and Interfaces. 2026 ; Vol. 97.

BibTeX

@article{21decb4036894f00931e549544e7e18a,
title = "Role of melting, evaporation, and plasma shielding in surface morphology formation during nanosecond laser texturing of silicon",
abstract = "This paper presents a systematic study of silicon microstructure formation under nanosecond laser irradiation in a low-pressure environment. The laser pulse fluence is shown to be the key parameter governing surface morphology. Based on scanning electron microscopy analysis, four stable types of laser-modified surfaces are identified: low-fluence modified surface, black silicon (B-Si), gray silicon (GraySi), and high-fluence modified surface. The plasma shielding efficiency is experimentally quantified over a wide fluence range. An adapted thermal numerical model incorporating plasma shielding is validated against the experimentally determined silicon modification threshold, measured plasma shielding efficiency, and mass removal data. The results demonstrate that B-Si formation occurs in a regime dominated by hydrodynamic processes in the molten layer with minimal evaporation, whereas GraySi emerges under conditions of enhanced evaporation and significant plasma shielding.",
keywords = "{"}ablation{"}, {"}black silicon{"}, {"}microstructure{"}, {"}nanosecond laser texturing{"}, {"}silicon{"}",
author = "Vasilev, {M M} and Rodionov, {A A} and Shukhov, {Yu G} and Smirnov, {N I} and Samokhvalov, {F A} and T Giannakis and M Kandyla and Sulyaeva, {V S} and Starinskiy, {S V}",
note = "The research is founded by the state contract IT SB RAS (№126021217045–9).",
year = "2026",
month = sep,
day = "15",
doi = "10.1016/j.surfin.2026.110008",
language = "English",
volume = "97",
journal = "Surfaces and Interfaces",
issn = "2468-0230",
publisher = "Elsevier Science Publishing Company, Inc.",

}

RIS

TY - JOUR

T1 - Role of melting, evaporation, and plasma shielding in surface morphology formation during nanosecond laser texturing of silicon

AU - Vasilev, M M

AU - Rodionov, A A

AU - Shukhov, Yu G

AU - Smirnov, N I

AU - Samokhvalov, F A

AU - Giannakis, T

AU - Kandyla, M

AU - Sulyaeva, V S

AU - Starinskiy, S V

N1 - The research is founded by the state contract IT SB RAS (№126021217045–9).

PY - 2026/9/15

Y1 - 2026/9/15

N2 - This paper presents a systematic study of silicon microstructure formation under nanosecond laser irradiation in a low-pressure environment. The laser pulse fluence is shown to be the key parameter governing surface morphology. Based on scanning electron microscopy analysis, four stable types of laser-modified surfaces are identified: low-fluence modified surface, black silicon (B-Si), gray silicon (GraySi), and high-fluence modified surface. The plasma shielding efficiency is experimentally quantified over a wide fluence range. An adapted thermal numerical model incorporating plasma shielding is validated against the experimentally determined silicon modification threshold, measured plasma shielding efficiency, and mass removal data. The results demonstrate that B-Si formation occurs in a regime dominated by hydrodynamic processes in the molten layer with minimal evaporation, whereas GraySi emerges under conditions of enhanced evaporation and significant plasma shielding.

AB - This paper presents a systematic study of silicon microstructure formation under nanosecond laser irradiation in a low-pressure environment. The laser pulse fluence is shown to be the key parameter governing surface morphology. Based on scanning electron microscopy analysis, four stable types of laser-modified surfaces are identified: low-fluence modified surface, black silicon (B-Si), gray silicon (GraySi), and high-fluence modified surface. The plasma shielding efficiency is experimentally quantified over a wide fluence range. An adapted thermal numerical model incorporating plasma shielding is validated against the experimentally determined silicon modification threshold, measured plasma shielding efficiency, and mass removal data. The results demonstrate that B-Si formation occurs in a regime dominated by hydrodynamic processes in the molten layer with minimal evaporation, whereas GraySi emerges under conditions of enhanced evaporation and significant plasma shielding.

KW - "ablation"

KW - "black silicon"

KW - "microstructure"

KW - "nanosecond laser texturing"

KW - "silicon"

UR - https://www.scopus.com/pages/publications/105044015539

UR - https://www.mendeley.com/catalogue/7bb3cdca-e676-3f62-866f-852476a7e3c8/

U2 - 10.1016/j.surfin.2026.110008

DO - 10.1016/j.surfin.2026.110008

M3 - Article

VL - 97

JO - Surfaces and Interfaces

JF - Surfaces and Interfaces

SN - 2468-0230

M1 - 110008

ER -

ID: 80148844