• V. P. Popov
  • M. A. Ilnitskii
  • G. P. Pokhil
  • A. I. Titov
  • P. A. Karaseov
  • K. V. Karabeshkin
  • Yu N. Pal'yanov
  • S. Rubanov
Original languageEnglish
Pages (from-to)634-637
Number of pages4
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume406
DOIs
Publication statusPublished - 1 Sept 2017
Externally publishedYes

    Research areas

  • Damage formation, Diamond, Ion implantation, Monte Carlo simulation, Proton range, TRIM, IMPLANTATION, NITROGEN-VACANCY CENTERS

    OECD FOS+WOS

ID: 25723357