Photoluminescence associated with {113} defects in oxygen-implanted silicon

Research output: Contribution to journal › Article › peer-review

Original language	English
Article number	1700317
Number of pages	8
Journal	Physica Status Solidi (A) Applications and Materials Science
Volume	214
Issue number	7
DOIs	https://doi.org/10.1002/pssa.201700317
Publication status	Published - 1 Jul 2017

defects, ion implantation, oxygen, photoluminescence, silicon, ROOM-TEMPERATURE, OPTICAL-PROPERTIES, EXTENDED DEFECTS, ELECTRON-IRRADIATION, ROD-LIKE DEFECTS, DEPENDENCE, EVOLUTION, LUMINESCENCE, SI, DIFFUSION

ID: 10094215