Microsrtucture of iridium enriched Pt xIr(1–x) film prepared by chemical vapor deposition

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Microsrtucture of iridium enriched Pt_xIr_(1–x) film prepared by chemical vapor deposition. / Dorovskikh, S. I.; Vikulova, E. S.; Korolkov, I. V. et al.

In: Journal of Structural Chemistry, Vol. 62, No. 9, 14, 09.2021, p. 1447-1456.

Research output: Contribution to journal › Article › peer-review

BibTeX

@article{c3a7ce22d6104cffbf80f17278df6386,

title = "Microsrtucture of iridium enriched Pt xIr(1–x) film prepared by chemical vapor deposition",

abstract = "MOCVD processes for the fabrication of PtxIr(1–x) films (x < 0.3, thickness 1.5-1.8 µm) on the contacts of diagnostic electrodes and titanium discs are developed using a combination of Pt(II) and Ir(I) acetylacetonate (acac) derivatives (Pt(acac)2, Ir(cod)(acac) (cod = cyclooctadiene-1,5) and oxygen as a gas reagent. It is shown that the ratios of metals in the films prepared on different types of supports are similar within the same experiment. The films contain phases of solid solution PtxIr(1–x) without admixtures of metallic and oxide phases; the ratio of metals in the sample volume corresponds to the one experimentally specified. EDS and XPS methods determine a lower iridium content after the formation of PtxIr(1–x) films in the subsurface layers (10 nm) than the XRD method. The surface of PtxIr(1–x) films consists of agglomerates formed by small particles. When the Pt content decreases from x = 0.3 to x = 0.2, the average size of these particles decreases from 29 nm to 24–25 nm and then remains virtually constant. The capacitance values of contacts with PtxIr(1–x) films vary within 62.6-84.5 mC/cm2.",

keywords = "bimetallic films, chemical vapor deposition, developed surface, electrochemical research, iridium, platinum",

author = "Dorovskikh, {S. I.} and Vikulova, {E. S.} and Korolkov, {I. V.} and Maksimovskiy, {E. A.} and Kal{\textquoteright}nyi, {D. B.} and Morozova, {N. B.}",

note = "Funding Information: This work was funded by the Russian Science Foundation, project No. 20-15-00222. Publisher Copyright: {\textcopyright} 2021, Pleiades Publishing, Ltd.",

year = "2021",

month = sep,

doi = "10.1134/S0022476621090146",

language = "English",

volume = "62",

pages = "1447--1456",

journal = "Journal of Structural Chemistry",

issn = "0022-4766",

publisher = "Springer GmbH & Co, Auslieferungs-Gesellschaf",

number = "9",

}

RIS

TY - JOUR

T1 - Microsrtucture of iridium enriched Pt xIr(1–x) film prepared by chemical vapor deposition

AU - Dorovskikh, S. I.

AU - Vikulova, E. S.

AU - Korolkov, I. V.

AU - Maksimovskiy, E. A.

AU - Kal’nyi, D. B.

AU - Morozova, N. B.

PY - 2021/9

Y1 - 2021/9

N2 - MOCVD processes for the fabrication of PtxIr(1–x) films (x < 0.3, thickness 1.5-1.8 µm) on the contacts of diagnostic electrodes and titanium discs are developed using a combination of Pt(II) and Ir(I) acetylacetonate (acac) derivatives (Pt(acac)2, Ir(cod)(acac) (cod = cyclooctadiene-1,5) and oxygen as a gas reagent. It is shown that the ratios of metals in the films prepared on different types of supports are similar within the same experiment. The films contain phases of solid solution PtxIr(1–x) without admixtures of metallic and oxide phases; the ratio of metals in the sample volume corresponds to the one experimentally specified. EDS and XPS methods determine a lower iridium content after the formation of PtxIr(1–x) films in the subsurface layers (10 nm) than the XRD method. The surface of PtxIr(1–x) films consists of agglomerates formed by small particles. When the Pt content decreases from x = 0.3 to x = 0.2, the average size of these particles decreases from 29 nm to 24–25 nm and then remains virtually constant. The capacitance values of contacts with PtxIr(1–x) films vary within 62.6-84.5 mC/cm2.

AB - MOCVD processes for the fabrication of PtxIr(1–x) films (x < 0.3, thickness 1.5-1.8 µm) on the contacts of diagnostic electrodes and titanium discs are developed using a combination of Pt(II) and Ir(I) acetylacetonate (acac) derivatives (Pt(acac)2, Ir(cod)(acac) (cod = cyclooctadiene-1,5) and oxygen as a gas reagent. It is shown that the ratios of metals in the films prepared on different types of supports are similar within the same experiment. The films contain phases of solid solution PtxIr(1–x) without admixtures of metallic and oxide phases; the ratio of metals in the sample volume corresponds to the one experimentally specified. EDS and XPS methods determine a lower iridium content after the formation of PtxIr(1–x) films in the subsurface layers (10 nm) than the XRD method. The surface of PtxIr(1–x) films consists of agglomerates formed by small particles. When the Pt content decreases from x = 0.3 to x = 0.2, the average size of these particles decreases from 29 nm to 24–25 nm and then remains virtually constant. The capacitance values of contacts with PtxIr(1–x) films vary within 62.6-84.5 mC/cm2.

KW - bimetallic films

KW - chemical vapor deposition

KW - developed surface

KW - electrochemical research

KW - iridium

KW - platinum

UR - http://www.scopus.com/inward/record.url?scp=85118226141&partnerID=8YFLogxK

UR - https://www.elibrary.ru/item.asp?id=47140664

U2 - 10.1134/S0022476621090146

DO - 10.1134/S0022476621090146

M3 - Article

AN - SCOPUS:85118226141

VL - 62

SP - 1447

EP - 1456

JO - Journal of Structural Chemistry

JF - Journal of Structural Chemistry

SN - 0022-4766

IS - 9

M1 - 14

ER -

ID: 34599335