Mechanism of CaSi2 Synthesis Under the Electron-Beam Irradiation During Molecular-Beam Epitaxy of CaF2 on Si(111) › Research Explorer

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Mechanism of CaSi2 Synthesis Under the Electron-Beam Irradiation During Molecular-Beam Epitaxy of CaF2 on Si(111)

Research output: Contribution to journal › Article › peer-review

DOI

https://doi.org/10.1007/s12633-025-03628-6
Final published version

Yuhan Wang
Aleksey V. Kacyuba
Gennadiy N. Kamaev
Aigul F. Zinovieva
Vladimir A. Zinovyev
Anatoly V. Dvurechenskii

Original language	English
Number of pages	6
Journal	Silicon
DOIs	https://doi.org/10.1007/s12633-025-03628-6
Publication status	Published - 9 Jan 2026

Research areas

Calcium compounds, Dissociation of CaF2, Electron-beam radiation, Molecular-beam epitaxy, Silicon

OECD FOS+WOS

1.04.EI CHEMISTRY, PHYSICAL

ID: 74196426