Standard

Low-pressure low-frequency inductive discharge with ferrite cores for large-scale plasma processing. / Isupov, M. V.; Fedoseev, A. V.; Sukhinin, G. I. et al.

In: Journal of Physics: Conference Series, Vol. 830, No. 1, 012054, 04.05.2017.

Research output: Contribution to journal › Conference article › peer-review

Harvard

Isupov, MV, Fedoseev, AV, Sukhinin, GI & Pinaev, VA 2017, 'Low-pressure low-frequency inductive discharge with ferrite cores for large-scale plasma processing', Journal of Physics: Conference Series, vol. 830, no. 1, 012054. https://doi.org/10.1088/1742-6596/830/1/012054

APA

Isupov, M. V., Fedoseev, A. V., Sukhinin, G. I., & Pinaev, V. A. (2017). Low-pressure low-frequency inductive discharge with ferrite cores for large-scale plasma processing. Journal of Physics: Conference Series, 830(1), [012054]. https://doi.org/10.1088/1742-6596/830/1/012054

Vancouver

Isupov MV, Fedoseev AV, Sukhinin GI, Pinaev VA. Low-pressure low-frequency inductive discharge with ferrite cores for large-scale plasma processing. Journal of Physics: Conference Series. 2017 May 4;830(1):012054. doi: 10.1088/1742-6596/830/1/012054

Author

Isupov, M. V. ; Fedoseev, A. V. ; Sukhinin, G. I. et al. / Low-pressure low-frequency inductive discharge with ferrite cores for large-scale plasma processing. In: Journal of Physics: Conference Series. 2017 ; Vol. 830, No. 1.

BibTeX

@article{e7a6c4a87df3441cb819e3be593db29a,
title = "Low-pressure low-frequency inductive discharge with ferrite cores for large-scale plasma processing",
abstract = "Electrophysical characteristics of a low-frequency (100 kHz) low-pressure (10-100 Pa) argon inductive discharge with ferrite cores have been investigated for discharge currents of 1-50 A, discharge chamber diameter of 230 mm. The dependencies of electric field strength on the argon pressure and discharge current were measured. Radial profiles of electron density and temperature were determined with double electric probes. Experimental results were compared with numerical results obtained by a self-consistent kinetic model of the low-frequency ICP, based on the simultaneous solution of a non-local Boltzmann equation for electron energy distribution function and balance equations for the metastable argon atoms density and gas temperature. Comparison of numerical and experimental results is presented.",
author = "Isupov, {M. V.} and Fedoseev, {A. V.} and Sukhinin, {G. I.} and Pinaev, {V. A.}",
year = "2017",
month = may,
day = "4",
doi = "10.1088/1742-6596/830/1/012054",
language = "English",
volume = "830",
journal = "Journal of Physics: Conference Series",
issn = "1742-6588",
publisher = "IOP Publishing Ltd.",
number = "1",

}

RIS

TY - JOUR

T1 - Low-pressure low-frequency inductive discharge with ferrite cores for large-scale plasma processing

AU - Isupov, M. V.

AU - Fedoseev, A. V.

AU - Sukhinin, G. I.

AU - Pinaev, V. A.

PY - 2017/5/4

Y1 - 2017/5/4

N2 - Electrophysical characteristics of a low-frequency (100 kHz) low-pressure (10-100 Pa) argon inductive discharge with ferrite cores have been investigated for discharge currents of 1-50 A, discharge chamber diameter of 230 mm. The dependencies of electric field strength on the argon pressure and discharge current were measured. Radial profiles of electron density and temperature were determined with double electric probes. Experimental results were compared with numerical results obtained by a self-consistent kinetic model of the low-frequency ICP, based on the simultaneous solution of a non-local Boltzmann equation for electron energy distribution function and balance equations for the metastable argon atoms density and gas temperature. Comparison of numerical and experimental results is presented.

AB - Electrophysical characteristics of a low-frequency (100 kHz) low-pressure (10-100 Pa) argon inductive discharge with ferrite cores have been investigated for discharge currents of 1-50 A, discharge chamber diameter of 230 mm. The dependencies of electric field strength on the argon pressure and discharge current were measured. Radial profiles of electron density and temperature were determined with double electric probes. Experimental results were compared with numerical results obtained by a self-consistent kinetic model of the low-frequency ICP, based on the simultaneous solution of a non-local Boltzmann equation for electron energy distribution function and balance equations for the metastable argon atoms density and gas temperature. Comparison of numerical and experimental results is presented.

UR - http://www.scopus.com/inward/record.url?scp=85020009906&partnerID=8YFLogxK

U2 - 10.1088/1742-6596/830/1/012054

DO - 10.1088/1742-6596/830/1/012054

M3 - Conference article

AN - SCOPUS:85020009906

VL - 830

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

SN - 1742-6588

IS - 1

M1 - 012054

ER -

ID: 10188150