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Local Anodic Oxidation of Thin GeO Films and Formation of Nanostructures Based on Them. / Astankova, K. N.; Kozhukhov, A. S.; Azarov, I. A. et al.

In: Physics of the Solid State, Vol. 60, No. 4, 01.04.2018, p. 700-704.

Research output: Contribution to journal › Article › peer-review

Harvard

Astankova, KN, Kozhukhov, AS, Azarov, IA, Gorokhov, EB, Sheglov, DV & Latyshev, AV 2018, 'Local Anodic Oxidation of Thin GeO Films and Formation of Nanostructures Based on Them', Physics of the Solid State, vol. 60, no. 4, pp. 700-704. https://doi.org/10.1134/S1063783418040030

APA

Astankova, K. N., Kozhukhov, A. S., Azarov, I. A., Gorokhov, E. B., Sheglov, D. V., & Latyshev, A. V. (2018). Local Anodic Oxidation of Thin GeO Films and Formation of Nanostructures Based on Them. Physics of the Solid State, 60(4), 700-704. https://doi.org/10.1134/S1063783418040030

Vancouver

Astankova KN, Kozhukhov AS, Azarov IA, Gorokhov EB, Sheglov DV, Latyshev AV. Local Anodic Oxidation of Thin GeO Films and Formation of Nanostructures Based on Them. Physics of the Solid State. 2018 Apr 1;60(4):700-704. doi: 10.1134/S1063783418040030

Author

Astankova, K. N. ; Kozhukhov, A. S. ; Azarov, I. A. et al. / Local Anodic Oxidation of Thin GeO Films and Formation of Nanostructures Based on Them. In: Physics of the Solid State. 2018 ; Vol. 60, No. 4. pp. 700-704.

BibTeX

@article{d06826e2244240238cbc112a5e8bdcfb,
title = "Local Anodic Oxidation of Thin GeO Films and Formation of Nanostructures Based on Them",
abstract = "The process of local anodic oxidation of thin GeO films has been studied using an atomic force microscope. The electron-probe microanalysis showed that oxidized areas of a GeO film were germanium dioxide. The effect of the voltage pulse duration applied to the probe–substrate system and the atmospheric humidity on the height of the oxide structures has been studied. The kinetics of the local anodic oxidation (LAO) in a semi-contact mode obeys the Cabrera–Mott model for large times. The initial growth rate of the oxide (R0) significantly increases and the time of starting the oxidation (t0) decreases as the atmospheric humidity increases by 20%, which is related to an increase in the concentration of oxygen-containing ions at the surface of the oxidized GeO film. It was shown that nanostructures in thin GeO layers can be formed by the LAO method.",
author = "Astankova, {K. N.} and Kozhukhov, {A. S.} and Azarov, {I. A.} and Gorokhov, {E. B.} and Sheglov, {D. V.} and Latyshev, {A. V.}",
year = "2018",
month = apr,
day = "1",
doi = "10.1134/S1063783418040030",
language = "English",
volume = "60",
pages = "700--704",
journal = "Physics of the Solid State",
issn = "1063-7834",
publisher = "PLEIADES PUBLISHING INC",
number = "4",

}

RIS

TY - JOUR

T1 - Local Anodic Oxidation of Thin GeO Films and Formation of Nanostructures Based on Them

AU - Astankova, K. N.

AU - Kozhukhov, A. S.

AU - Azarov, I. A.

AU - Gorokhov, E. B.

AU - Sheglov, D. V.

AU - Latyshev, A. V.

PY - 2018/4/1

Y1 - 2018/4/1

N2 - The process of local anodic oxidation of thin GeO films has been studied using an atomic force microscope. The electron-probe microanalysis showed that oxidized areas of a GeO film were germanium dioxide. The effect of the voltage pulse duration applied to the probe–substrate system and the atmospheric humidity on the height of the oxide structures has been studied. The kinetics of the local anodic oxidation (LAO) in a semi-contact mode obeys the Cabrera–Mott model for large times. The initial growth rate of the oxide (R0) significantly increases and the time of starting the oxidation (t0) decreases as the atmospheric humidity increases by 20%, which is related to an increase in the concentration of oxygen-containing ions at the surface of the oxidized GeO film. It was shown that nanostructures in thin GeO layers can be formed by the LAO method.

AB - The process of local anodic oxidation of thin GeO films has been studied using an atomic force microscope. The electron-probe microanalysis showed that oxidized areas of a GeO film were germanium dioxide. The effect of the voltage pulse duration applied to the probe–substrate system and the atmospheric humidity on the height of the oxide structures has been studied. The kinetics of the local anodic oxidation (LAO) in a semi-contact mode obeys the Cabrera–Mott model for large times. The initial growth rate of the oxide (R0) significantly increases and the time of starting the oxidation (t0) decreases as the atmospheric humidity increases by 20%, which is related to an increase in the concentration of oxygen-containing ions at the surface of the oxidized GeO film. It was shown that nanostructures in thin GeO layers can be formed by the LAO method.

UR - http://www.scopus.com/inward/record.url?scp=85045762928&partnerID=8YFLogxK

U2 - 10.1134/S1063783418040030

DO - 10.1134/S1063783418040030

M3 - Article

AN - SCOPUS:85045762928

VL - 60

SP - 700

EP - 704

JO - Physics of the Solid State

JF - Physics of the Solid State

SN - 1063-7834

IS - 4

ER -

ID: 12798964