Original languageEnglish
Pages (from-to)88-95
Number of pages8
JournalOptoelectronics, Instrumentation and Data Processing
Volume53
Issue number1
DOIs
Publication statusPublished - 1 Jan 2017

    OECD FOS+WOS

    Research areas

  • high-aspect-ratio microstructures, high-pass filters, X-ray lithography, WAVES, SPECTROSCOPY, GENERATION, RADIATION

ID: 8679208