Hierarchical anti-reflective laser-induced periodic surface structures (LIPSSs) on amorphous Si films for sensing applications › Research Explorer

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Hierarchical anti-reflective laser-induced periodic surface structures (LIPSSs) on amorphous Si films for sensing applications

Research output: Contribution to journal › Article › peer-review

DOI

https://doi.org/10.1039/d0nr02182b
Final published version

A. Dostovalov
K. Bronnikov
V. Korolkov
S. Babin
E. Mitsai
A. Mironenko
M. Tutov
D. Zhang
K. Sugioka
J. Maksimovic
T. Katkus
S. Juodkazis
A. Zhizhchenko
A. Kuchmizhak

Original language	English
Pages (from-to)	13431-13441
Number of pages	11
Journal	Nanoscale
Volume	12
Issue number	25
DOIs	https://doi.org/10.1039/d0nr02182b
Publication status	Published - 7 Jul 2020

Research areas

FEMTOSECOND LASER, LARGE-AREA, FABRICATION, SILICON, METAL, METASURFACES, RIPPLES

OECD FOS+WOS

ID: 24726474