Research output: Contribution to journal › Conference article › peer-review
| Original language | English |
|---|---|
| Article number | 012002 |
| Journal | Journal of Physics: Conference Series |
| Volume | 1560 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 24 Jun 2020 |
| Event | 2020 International Interdisciplinary Scientific Conference on Advanced Element Base of Micro- and Nano-Electronics - Moscow, Russian Federation Duration: 20 Apr 2020 → 23 Apr 2020 |
ID: 35676614